Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2016
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Application #:
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13742596
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Filing Dt:
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01/16/2013
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Publication #:
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Pub Dt:
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08/01/2013
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Inventors:
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Paul F. Ma, Guojun Liu, Annamalai Lakshmanan, Dien-Yeh Wu, Anantha K. Subramani
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Title:
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METHOD OF DEPOSITING METALS USING HIGH FREQUENCY PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| SERVILLA WHITNEY LLC |
| 33 WOOD AVENUE SOUTH |
| SECOND FLOOR, SUITE 210 |
| ISELIN, NJ 08830 |
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