Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14283159
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Filing Dt:
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05/20/2014
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Publication #:
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Pub Dt:
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12/25/2014
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Inventors:
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Sergey G. Belostotskiy, Andrew Nguyen, Chinh Dinh, Michael G. Chafin
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Title:
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NON-INTRUSIVE MEASUREMENT OF A WAFER DC SELF-BIAS IN SEMICONDUCTOR PROCESSING EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BLAKELY SOKOLOFF TAYLOR & ZAFMAN LLP |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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