Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09086105
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Filing Dt:
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05/28/1998
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Publication #:
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Pub Dt:
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05/24/2001
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Inventors:
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STEPHEN P. DEORNELLAS, ALFRED COFER
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Title:
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METHOD AND APPARATUS FOR INCREASING WAFER THROUGHPUT BETWEEN CLEANINGS IN SEMICONDUCTOR PROCESSING REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2201 S. MCDOWELL BOULEVARD |
| PETALUMA, CALIFORNIA 94955 |
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| FLIESLER, DUBB, MEYER & LOVEJOY |
| SHELDON R. MEYER |
| FOUR EMBARCADERO CENTER, SUITE 400 |
| SAN FRANCISCO, CA 94111 |
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Assignment:
2
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| 226 AIRPORT PARKWAY |
| SAN JOSE, CALIFORNIA 95110 |
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| COOLEY GODWARD LLP |
| JONI GOK |
| ONE MARITIME PLAZA, 20TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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Assignment:
3
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LEVY, SMALL & LALLAS |
| ATTN: ROBIN C. DUNN |
| 815 MORAGA DRIVE |
| LOS ANGELES, CALIFORNIA 90049 |
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