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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/04/2007
Application #:
09798746
Filing Dt:
03/02/2001
Publication #:
Pub Dt:
11/01/2001
Inventors:
Douglas S. Hobbs, James J. Cowan
Title:
ACTIVELY STABILIZED, SINGLE INPUT BEAM, INTERFERENCE LITHOGRAPHY SYSTEM AND METHOD
Assignment: 1
Reel/Frame:
011596/0832Recorded: 03/02/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/02/2001
Exec Dt:
03/02/2001
Assignee:
9 WINSTON ROAD
LEXINGTON, MASSACHUSETTS 02421
Correspondent:
MIRICK, O'CONNELL ET AL
BRIAN M. DINGMAN
100 FRONT STREET
WORCESTER, MA 01608-1477

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