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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/04/2004
Application #:
10079826
Filing Dt:
02/22/2002
Publication #:
Pub Dt:
10/10/2002
Inventors:
Everhardus Cornelis Mos, Maurits Van Der Schaar
Title:
COMPUTER PROGRAM FOR DETERMINING A CORRECTED POSITION OF A MEASURED ALIGNMENT MARK, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Assignment: 1
Reel/Frame:
012816/0997Recorded: 04/19/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/10/2002
Exec Dt:
04/10/2002
Assignee:
DE RUN 1110
NL-5503 LA VELDHOVEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP
JACK S. BARUFKA
1600 TYSONS BOULEVARD
INTELLECTUAL PROPERTY GROUP
MCLEAN, VA 22102

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