Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10139625
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Filing Dt:
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05/07/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Inventor:
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Johannes Jacobus Matheus Baselmans
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Title:
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METHOD OF CALIBRATION OF A LITHOGRAPHIC APPARATUS, MASK FOR USE IN CALIBRATION OF LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURED THEREBY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110 |
| NL-5503 LA VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| JOHN P. DARLING |
| INTELLECTUAL PROPERTY GROUP |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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