Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09991166
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Filing Dt:
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11/16/2001
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Publication #:
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Pub Dt:
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01/16/2003
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Inventors:
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Chentsau Ying, Jeng H. Hwang, Yong Deuk Ko, Se Jin Oh, Chan Ouk Jung
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Title:
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METHOD OF REDUCING PARTICULATES IN A PLASMA ETCH CHAMBER DURING A METAL ETCH PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| M/S 2061 |
| 3050 BOWERS AVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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