Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/13/2005
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Application #:
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10446367
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Filing Dt:
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05/27/2003
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Publication #:
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Pub Dt:
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10/30/2003
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Inventors:
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Hiroji Hanawa, Nils Johansson, Boguslaw Swedek, Manoocher Birang
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Title:
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EDDY CURRENT SENSING OF METAL REMOVAL FOR CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVE |
M/S 2061 |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC |
ROBERT W. MULCAHY |
PATENT COUNSEL, M/S 2061 |
PO BOX 450-A |
SANTA CLARA, CA 95052 |
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