Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10151722
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Filing Dt:
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05/20/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Inventor:
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Daniel Goodman
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Title:
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Stabilization of electronegative plasmas with feedback control of RF generator systems
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887-4610 |
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| TESTA, HURWITZ & THIBEAULT, LLP |
| JAMIE H. ROSE |
| HIGH STREET TOWER |
| 125 HIGH STREET |
| BOSTON, MA 02110 |
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