Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10330516
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Filing Dt:
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12/27/2002
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Publication #:
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Pub Dt:
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03/04/2004
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Inventors:
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Cem Basceri, Gurtej S. Sandhu
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Title:
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METHODS FOR DELIVERING A SOURCE CHEMICAL INTO A DEPOSITION CHAMBER USING PIEZOELECTRIC ACTUATORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8000 S. FEDERAL WAY |
| BOISE, IDAHO 83707-0006 |
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| HOWREY SIMON ARNOLD & WHITE, LLP |
| TERRIL LEWIS |
| 750 BERING DRIVE |
| HOUSTON, VA 77057-2198 |
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