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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10371567
Filing Dt:
02/21/2003
Publication #:
Pub Dt:
08/26/2004
Inventors:
Christof Gabriel Krautschik, Maciek E. Orczyk, John M. Urata
Title:
Enhancing light coupling efficiency for ultra high numerical aperture lithography through first order transmission optimization
Assignment: 1
Reel/Frame:
013810/0429Recorded: 02/21/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/19/2003
Exec Dt:
02/18/2003
Exec Dt:
02/19/2003
Assignee:
2200 MISSION COLLEGE BOULEVARD
SANTA CLARA, CALIFORNIA 95052
Correspondent:
FISH & RICHARDSON P.C.
SCOTT C. HARRIS
4350 LA JOLLA VILLAGE DR.
STE. 500
SAN DIEGO, CA 92122

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