Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10386356
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Filing Dt:
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03/11/2003
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Publication #:
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Pub Dt:
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09/16/2004
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Inventors:
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Jason P. Rolland, Joseph M. DeSimone
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Title:
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IMMERSION LITHOGRAPHY METHODS USING CARBON DIOXIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 308 BYNUM HALL, CAMPUS BOX 4105 |
| CHAPEL HILL, NORTH CAROLINA 27599-4105 |
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| MYERS BIGEL SIBLEY & SAJOVEC |
| MITCHELL S. BIGEL |
| PO BOX 37428 |
| RALEIGH, NC 27627 |
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