Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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10815116
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Filing Dt:
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03/31/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Inventors:
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Andreas Kirchner, Bernhard Kneer, Hans-Jurgen Mann
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Title:
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METHOD FOR DISTORTION CORRECTION IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STR. 22 |
| D-73447 OBERKOCHEN, GERMANY |
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| FACTOR & LAKE, LTD. |
| JODY L. FACTOR |
| 1327 W. WASHINGTON BLVD. |
| SUITE G/H |
| CHICAGO, IL 60607 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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