Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10496102
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Filing Dt:
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11/23/2004
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Publication #:
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Pub Dt:
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07/07/2005
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Inventors:
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Markus Kirchhoff, Mirko Vogt, Stephan Wege, Frank Katzwinkel
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Title:
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Photolithographic method for forming a structure in a semiconductor substrate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| 81669 MUNCHEN, GERMANY |
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| KEVIN R. SPIVAK |
| MORRISON & FOERSTER LLP |
| 2000 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20006 |
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