Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10871774
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Filing Dt:
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06/18/2004
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Publication #:
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Pub Dt:
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12/22/2005
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Inventors:
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Phillip W. Carter, Robert Vacassy
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Title:
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CMP composition for improved oxide removal rate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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870 NORTH COMMONS DRIVE |
AURORA, ILLINOIS 60504 |
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STEVEN D WESEMAN, ASSOCIATE GENERAL COUN |
CABOT MICROELECTRONICS CORPORATION |
870 NORTH COMMONS DRIVE |
AURORA, IL 60504 |
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