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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
7277188
Issue Dt:
10/02/2007
Application #:
11138175
Filing Dt:
05/26/2005
Publication #:
20060001878
Pub Dt:
01/05/2006
Inventors:
Palash P. Das, Thomas Hofmann, Otto Boucky, Ernst Stumpp, Berthold Matzkovits et al
Title:
SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
Assignment: 1
Reel/Frame:
016535/0331Recorded: 09/14/2005Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BOUCKY, OTTO
Exec Dt:
08/17/2005
STUMP, ERNEST
Exec Dt:
09/06/2005
MATZKOVITS, BERTHOLD
Exec Dt:
08/22/2005
HOELL, MICHAEL
Exec Dt:
08/17/2005
WALTHER, JOERG
Exec Dt:
09/02/2005
BRENNER, KURT
Exec Dt:
08/22/2005
GRUPP, GUENTER
Exec Dt:
08/29/2005
Assignee:
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
73446 OBERKOCHEN
OBERKOCHEN, GERMANY
Correspondent:
SARAH BRIGGS
17075 THORNMINT COURT
LEGAL DEPT., MS/4-2C
SAN DIEGO, CA 92127-2413
Assignment: 2
Reel/Frame:
016457/0191Recorded: 08/26/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DAS, PALASH P.
Exec Dt:
08/19/2005
HOFMANN, THOMAS
Exec Dt:
08/19/2005
SANDSTROM, RICHARD L.
Exec Dt:
08/19/2005
Assignee:
CYMER, INC.
17075 THORNMINT CT.
LEGAL DEPT., MS/4-2C
SAN DIEGO, CALIFORNIA 92027
Correspondent:
CYMER, INC.
17075 THORNMINT CT.
CYMER, INC., LEGAL DEPT., MS/4-2C
SAN DIEGO, CA 92127
Assignment: 3
Reel/Frame:
032415/0735Recorded: 03/12/2014Pages: 23
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
CYMER, INC.
Exec Dt:
05/30/2013
Assignee:
CYMER, LLC
17075 THORNMINT COURT
INTELLECTUAL PROP DEPT - MS/4-2D
SAN DIEGO, CALIFORNIA 92127
Correspondent:
JEFFREY J BROOKS
17075 THORNMINT COURT
INTELLECTUAL PROP DEPT - MS/4-2D
SAN DIEGO, CA 92127

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