Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/24/2010
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Application #:
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11173932
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Filing Dt:
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07/01/2005
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Publication #:
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Pub Dt:
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05/18/2006
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Inventors:
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Michael K. Gallagher, Gerald B. Wayton, Gregory P. Prokopowicz, Stewart A. Robertson
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Title:
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COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 455 FOREST STREET |
| MARLBOROUGH, MASSACHUSETTS 01752 |
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| PETER F. CORLESS |
| ROHM AND HAAS ELECTRONICS MATERIALS LLC |
| 455 FOREST STREET |
| MARLBOROUGH, MA 01752 |
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