Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11423651
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Filing Dt:
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06/12/2006
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Publication #:
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Pub Dt:
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01/04/2007
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Inventors:
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Nitin K. Ingle, Zheng Yuan, Vikash Banthia, Xinyun Xia, Hali J.L. Forstner, Rong Pan
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Title:
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MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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EUGENE J. BERNARD |
TOWNSEND AND TOWNSEND AND CREW LLP |
TWO EMBARCARDERO CENTER, EIGHTH FLOOR |
SAN FRANCISCO, CA 94111-3834 |
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