Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/03/2011
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Application #:
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12026763
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Filing Dt:
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02/06/2008
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Publication #:
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Pub Dt:
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08/06/2009
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Inventors:
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Axel Aguado Granados, Benjamin Aaron Fox, Andrew Benson Maki, Trevor Joseph Timpane et al
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Title:
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METHOD AND APPARATUS FOR MEASUREMENT AND CONTROL OF PHOTOMASK TO SUBSTRATE ALIGNMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| ROBERT R. WILLIAMS |
| 3605 HIGHWAY 52 NORTH |
| ROCHESTER, MN 55901 |
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