Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12478083
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Filing Dt:
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06/04/2009
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Publication #:
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Pub Dt:
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12/10/2009
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Inventors:
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Takeshi Asayama, Hiroshi Someya, Masato Moriya, Hideo Hoshino, Tamotsu Abe
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Title:
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METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GENERATOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-3-6 AKASAKA, MINATO-KU, |
TOKYO, JAPAN 107-8414 |
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KRATZ, QUINTOS & HANSON, LLP |
1420 K STREET, N.W. SUITE 400 |
WASHINGTON, DC 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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400 YOKOKURASHINDEN, |
OYAMA-SHI, TOCHIGI-KEN, JAPAN 323-8558 |
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KRATZ, QUINTOS & HANSON, LLP |
4TH FLOOR |
1420 K STREET, N.W. |
WASHINGTON, DC 20005 |
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