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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
10/05/2021
Application #:
12804507
Filing Dt:
07/22/2010
Publication #:
Pub Dt:
03/03/2011
Inventors:
Dirk Preikszas, Michael Albiez
Title:
Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
Assignment: 1
Reel/Frame:
025224/0164Recorded: 11/01/2010Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/15/2010
Exec Dt:
10/22/2010
Assignee:
CARL-ZEISS-STRASSE 56
OBERKOCHEN, GERMANY 73447
Correspondent:
MUIRHEAD AND SATURNELLI, LLC
200 FRIBERG PARKWAY
SUITE 1001
WESTBOROUGH, MA 01581
Assignment: 2
Reel/Frame:
030529/0564Recorded: 06/02/2013Pages: 11
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/14/2012
Assignee:
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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