Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12637961
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Filing Dt:
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12/15/2009
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Publication #:
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Pub Dt:
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06/16/2011
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Inventors:
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Vahan Senekerimyan, Nam-Hyong Kim, Robert A. Bergstedt, William N. Partlo et al
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Title:
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METROLOGY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT CT. |
| SAN DIEGO, CALIFORNIA 92127 |
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| DIANA DIBERARDINO |
| 268 CONNECTING RD. |
| PITTSBURGH, PA 15228 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| JEFFREY J BROOKS |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT MS/4-2D |
| SAN DIEGO, CA 92127 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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