Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/05/2015
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Application #:
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13480967
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Filing Dt:
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05/25/2012
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Publication #:
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Pub Dt:
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01/03/2013
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Inventors:
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JIVKO DINEV, Saravjeet Singh, Khalid M. Sirajuddin, Tong Liu, Puneet Bajaj, Rohit Mishra et al
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Title:
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INCREASED DEPOSITION EFFICIENCY AND HIGHER CHAMBER CONDUCTANCE WITH SOURCE POWER INCREASE IN AN INDUCTIVELY COUPLED PLASMA (ICP) CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP - - APPM/TX |
| 3040 POST OAK BOULEVARD, SUITE 1500 |
| HOUSTON, TX 77056 |
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