Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/07/2019
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Application #:
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13591167
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Filing Dt:
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08/21/2012
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Publication #:
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Pub Dt:
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02/27/2014
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Inventors:
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Chih-I Peng, Hsiang-Pi Chang, Cary Chia-Chiung Lo, Teng-Chun Tsai, Kuo-Yin Lin et al
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Title:
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SYSTEM AND METHOD FOR OPERATING CHEMICAL MECHANICAL POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, NW |
| WASHINGTON, DC 20005-3096 |
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