Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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14149560
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Filing Dt:
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01/07/2014
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Publication #:
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Pub Dt:
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05/15/2014
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Inventors:
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Barry L. CHIN, Alfred W. MAK, Lawrence C. LEI, Ming XI, Hua CHUNG, Ken Kaung LAI et al
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP |
3040 POST OAK BLVD |
SUITE 1500 |
HOUSTON, TX 77056 |
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