Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/05/2019
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Application #:
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15681102
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Filing Dt:
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08/18/2017
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Publication #:
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Pub Dt:
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03/01/2018
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Inventors:
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Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei
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Title:
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Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| PATENT DEPT. |
| TEMPE, ARIZONA 85284 |
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| LISA HOFFMANN |
| 7350 TILGHMAN STREET, SUITE 104 |
| PATENT DEPT. |
| ALLENTOWN, PA 18106-9000 |
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