Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/17/2022
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Application #:
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16030849
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Filing Dt:
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07/09/2018
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Publication #:
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Pub Dt:
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01/17/2019
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Inventors:
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Oleg Khodykin, Alexander Kuznetsov, Michael Friedmann, Daniel Wack, Andrei V. Shchegrov et al
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Title:
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Methods And Systems For Semiconductor Metrology Based On Polychromatic Soft X-Ray Diffraction
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| JOSEPH S SPANO |
| 851 BURLWAY ROAD, SUITE 407 |
| BURLINGAME, CA 94010 |
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