Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/2021
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Application #:
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16134108
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Filing Dt:
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09/18/2018
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Publication #:
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Pub Dt:
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03/21/2019
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Inventors:
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Xinjian Lei, Matthew R. MacDonald, Meiliang Wang
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Title:
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Trisilylamine Derivatives as Precursors for High Growth Rate Silicon-Containing Films
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8555 SOUTH RIVER PARKWAY |
PATENT DEPT. |
TEMPE, ARIZONA 85284 |
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ROBIN M. WESTON |
7350 TILGHMAN STREET, SUITE 104 |
PATENT DEPT. |
ALLENTOWN, PA 18106-9000 |
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05/29/2024 08:01 PM
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