Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/04/2020
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Application #:
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16165786
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Filing Dt:
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10/19/2018
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Publication #:
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Pub Dt:
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04/23/2020
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Inventors:
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Zhenxing Bi, Muthumanickam Sankarapandian, Richard A. Conti, Michael P. Belyansky
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Title:
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Highly Selective Dry Etch Process for Vertical FET STI Recess
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| MICHAEL J. CHANG |
| 84 SUMMIT AVENUE |
| MICHAEL J. CHANG, LLC |
| MILFORD, CT 06460 |
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