Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/14/2024
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Application #:
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17085255
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Filing Dt:
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10/30/2020
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Publication #:
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Pub Dt:
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05/06/2021
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Inventors:
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Zubin Huang, Jian Li, Rui Cheng
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Title:
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SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| 1100 PEACHTREE STREET, SUITE 2800 |
| ATLANTA, GA 30309 |
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05/24/2024 04:51 PM
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