Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17830232
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Filing Dt:
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06/01/2022
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Publication #:
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Pub Dt:
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12/08/2022
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Inventors:
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Jens Fittkau, Christiane Le Tiec, Curt Rettig, Dirk Nolte, Kay Mittler, Carsten Becher
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Title:
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Light-Enhanced Ozone Wafer Processing System and Method of Use
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2 TECH DRIVE, SUITE 201 |
ANDOVER, MASSACHUSETTS 01810 |
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MKS INSTRUMENTS, INC. LI MEI VERMILYA |
2 TECH DRIVE |
ANDOVER, MA 01810 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2 TECH DRIVE, SUITE 201 |
ANDOVER, MASSACHUSETTS 01810 |
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BRIAN SWIENTON |
2 TECH DRIVE, SUITE 201 |
ANDOVER, MA 01810 |
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Assignment:
3
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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10 SOUTH DEARBORN STREET |
FLOOR L2N |
CHICAGO, ILLINOIS 60603 |
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JEFFREY NEGRON |
PAUL HASTINGS LLP |
200 PARK AVENUE |
NEW YORK, NY 10166 |
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05/23/2024 04:09 PM
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