Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17982472
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Filing Dt:
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11/07/2022
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Publication #:
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Pub Dt:
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04/11/2024
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Inventors:
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Chad HUARD, Premkumar PANNEERCHELVAM, Shuo HUANG, Mark D. SMITH
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Title:
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PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR ACCELERATED ETCH PROCESS DEVELOPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| HODGSON RUSS LLP |
| 140 PEARL STREET |
| SUITE 100 |
| BUFFALO, NY 14202 |
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