Patent Assignment Details
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Reel/Frame: | 006322/0001 | |
| Pages: | 5 |
| | Recorded: | 12/12/1991 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07806096
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Filing Dt:
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12/11/1991
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Title:
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CHEMICAL MECHANICAL PLANARIZATION (CMP) OF A SEMICONDUCTOR WAFER USING ACOUSTICAL WAVES FOR IN-SITU END POINT DETECTION
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Assignee
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2805 EAST COLUMBIA ROAD |
BOISE, IDAHO 83706 |
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Correspondence name and address
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STEPHEN A. GRATTON
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NYDEGGER & ASSOCIATES
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4350 LA JOLLA VILLAGE DR., STE. 950
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SAN DIEGO, CA 92122
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