Patent Assignment Details
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| Reel/Frame: | 006989/0241 | |
| Pages: | 4 |
| | Recorded: | 04/28/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/14/1995
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Application #:
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08234899
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Filing Dt:
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04/28/1994
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Title:
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DUAL PHASE AND HYBRID PHASE SHIFTING MASK FABRICATION USING A SURFACE ETCH MONITORING TECHNIQUE
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Assignee
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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MICHAEL J. BALCONI-LAMICA
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IBM CORPORATION
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INTELLECTUAL PROPERTY LAW DEPT.
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DEPT. 34H/BLDG. 300-482, 1580 RT. 52
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HOPEWELL JUNCTION, NY 12533-6531
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