Patent Assignment Details
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Reel/Frame: | 007771/0597 | |
| Pages: | 2 |
| | Recorded: | 11/20/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/26/1998
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Application #:
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08560851
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Filing Dt:
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11/20/1995
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Title:
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METHOD OF MEASURING BIAS AND EDGE OVERLAY ERROR FOR SUB-0.5 MICRON GROUND RULES
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Assignee
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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IBM CORPORATION, IP LAW DEPT.
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ALISON D. MORTINGER
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DEPT. 18G/BLDG. 300-482
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1580 ROUTE 52
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HOPEWELL JUNCTION, NY 12533-6531
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