|
Total properties:
38
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/1993
|
Application #:
|
07696897
|
Filing Dt:
|
05/07/1991
|
|
Title:
|
SYSTEM FOR REMOVING MATERIAL FROM A WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/1994
|
Application #:
|
07804872
|
Filing Dt:
|
12/06/1991
|
|
Title:
|
APPARATUS AND METHOD FOR INTERFEROMETAICALLY MEASURING THE THICKNESS OF THIN FILMS USING FULL APERTURE IRRADIATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/1994
|
Application #:
|
07807535
|
Filing Dt:
|
12/13/1991
|
|
Title:
|
METHODS AND APPARATUS FOR CONFINEMENT OF A PLASMA ETCH REGION FOR PRECISION SHAPING OF SURFACES OF SUBSTANCES AND FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/1994
|
Application #:
|
07807536
|
Filing Dt:
|
12/13/1991
|
|
Title:
|
METHODS AND APPARATUS FOR GENERATING A PLASMA FOR "DOWNSTREAM" RAPID SHAPING OF SURFACES OF SUBSTRATES AND FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/1994
|
Application #:
|
07807544
|
Filing Dt:
|
12/13/1991
|
|
Title:
|
METHOD TO DETERMINE TOOL PATHS FOR THINNING AND CORRECTING ERRORS IN THICKNESS PROFILES OF FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/1993
|
Application #:
|
07825520
|
Filing Dt:
|
01/24/1992
|
|
Title:
|
APPARATUS FOR PROVIDING CONSISTENT REGISTRATION OF SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/1993
|
Application #:
|
07842828
|
Filing Dt:
|
02/27/1992
|
|
Title:
|
METHOD AND APPARATUS FOR REMOVAL OF SUBSURFACE DAMAGE IN SEMICONDUCTOR MATERIALS BY PLASMA ETCHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/27/1994
|
Application #:
|
07842936
|
Filing Dt:
|
02/27/1992
|
|
Title:
|
METHOD AND APPARATUS FOR NON-CONTACT PLASMA POLISHING AND SMOOTHING OF UNIFORMLY THINNED SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/1994
|
Application #:
|
07854718
|
Filing Dt:
|
03/23/1992
|
|
Title:
|
METHOD AND APPARATUS FOR PRODUCING VARIABLE SPATIAL FREQUENCY CONTROL IN PLASMA ASSISTED CHEMICAL ETCHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/1994
|
Application #:
|
07855404
|
Filing Dt:
|
03/23/1992
|
|
Title:
|
APPARATUS AND METHOD FOR SHIELDING A WORKPIECE HOLDING MECHANISM FROM DEPRECIATIVE EFFECTS DURING WORKPIECE PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/1994
|
Application #:
|
07891344
|
Filing Dt:
|
05/29/1992
|
|
Title:
|
APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY BY DEFORMING A THIN FILM LAYER INTO A REFLECTIVE CONDENSER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/1994
|
Application #:
|
07899419
|
Filing Dt:
|
06/16/1992
|
|
Title:
|
APPARATUS AND METHOD FOR OPTIMALLY SCANNING A TWO-DIMENSIONAL SURFACE OF ONE OR MORE OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/1994
|
Application #:
|
07906079
|
Filing Dt:
|
06/29/1992
|
|
Title:
|
APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY ON A THIN FILM LAYER HAVING SHAPE DEFORMATIONS AND LOCAL SLOPE VARIATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/1994
|
Application #:
|
07925721
|
Filing Dt:
|
08/04/1992
|
|
Title:
|
APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY USING A CORRELATION REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/1994
|
Application #:
|
07937793
|
Filing Dt:
|
08/28/1992
|
|
Title:
|
APPARATUS FOR PROVIDING CONSISTENT, NON-JAMMING REGISTRATION OF SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/1994
|
Application #:
|
07986650
|
Filing Dt:
|
12/08/1992
|
|
Title:
|
FLUID MIXER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/1994
|
Application #:
|
07987926
|
Filing Dt:
|
12/10/1992
|
|
Title:
|
APPARATUS AND METHOD FOR MEASURING THE THICKNESS OF THIN FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/1994
|
Application #:
|
08036310
|
Filing Dt:
|
03/24/1993
|
|
Title:
|
APPARATUS FOR OPTIMALLY SCANNING A TWO-DIMENSIONAL SURFACE OF ONE OR MORE OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/1995
|
Application #:
|
08037069
|
Filing Dt:
|
03/25/1993
|
|
Title:
|
APPARATUS AND METHOD FOR THICK WAFER MEASUREMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/1994
|
Application #:
|
08093120
|
Filing Dt:
|
07/15/1993
|
|
Title:
|
ELECTRODE ASSEMBLY USEFUL IN CONFINED PLASMA ASSISTED CHEMICAL ETCHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/1994
|
Application #:
|
08110021
|
Filing Dt:
|
08/20/1993
|
|
Title:
|
HIGHLY DURABLE NONCONTAMINATING SURROUND MATERIALS FOR PLASMA ETCHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/1995
|
Application #:
|
08134728
|
Filing Dt:
|
10/12/1993
|
|
Title:
|
FILM THICKNESS MEASUREMENT OF STRUCTURES CONTAINING A SCATTERING SURFACE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/1995
|
Application #:
|
08134729
|
Filing Dt:
|
10/12/1993
|
|
Title:
|
COFOCAL OPTICAL SYSTEM FOR THICKNESS MEASUREMENTS OF PATTERNED WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/1997
|
Application #:
|
08152780
|
Filing Dt:
|
11/15/1993
|
|
Title:
|
METHOD FOR CO-REGISTERING SEMICONDUCTOR WAFERS UNDERGOING WORK IN ONE OR MORE BLIND PROCESS MODULES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/1995
|
Application #:
|
08153236
|
Filing Dt:
|
11/15/1993
|
|
Title:
|
WAFER FLOW ARCHITECTURE FOR PRODUCTION WAFER PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/1995
|
Application #:
|
08153681
|
Filing Dt:
|
11/17/1993
|
|
Title:
|
METHOD OF PLANARIZING MICROSTRUCTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/1994
|
Application #:
|
08162510
|
Filing Dt:
|
12/02/1993
|
|
Title:
|
METHOD AND APPARATUS FOR A MATERIAL REMOVAL TOOL WITH LOW TOL ACCELERA TIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/1996
|
Application #:
|
08179594
|
Filing Dt:
|
12/22/1993
|
|
Title:
|
METHOD AND APPARATUS FOR MEASURING FILM THICKNESS IN MULTILAYER THIN FILM STACK BY COMPARISON TO A REFERENCE LIBRARY OF THEORETICAL SIGNATURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/1994
|
Application #:
|
08189262
|
Filing Dt:
|
01/28/1994
|
|
Title:
|
ELECTRODE FOR USE IN A PLASMA ASSISTED CHEMICAL ETCHING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/1995
|
Application #:
|
08252630
|
Filing Dt:
|
06/02/1994
|
|
Title:
|
PLASMA PRESSURE CONTROL ASSEMBLY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/1996
|
Application #:
|
08304982
|
Filing Dt:
|
09/13/1994
|
|
Title:
|
SUBSTRATE THICKNESS MEASUREMENT USING OBLIQUE INCIDENCE MULTISPECTRAL INTERFEROMETRY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/08/1996
|
Application #:
|
08304983
|
Filing Dt:
|
09/13/1994
|
|
Title:
|
APPARATUS FOR MEASURING, THINNING AND FLATTENING SILICON STRUCTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/1996
|
Application #:
|
08304984
|
Filing Dt:
|
09/13/1994
|
|
Title:
|
TRANSPARENT OPTICAL CHUCK INCORPORATING OPTICAL MONITORING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/1996
|
Application #:
|
08309516
|
Filing Dt:
|
09/20/1994
|
|
Title:
|
APPARATUS AND METHOD FOR PERFORMING HIGH SPATIAL RESOLUTION THIN FILM LAYER THICKNESS METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/22/1996
|
Application #:
|
08322820
|
Filing Dt:
|
10/13/1994
|
|
Title:
|
SOLID ANNULAR GAS DISCHARGE ELECTRODE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/1996
|
Application #:
|
08360535
|
Filing Dt:
|
12/21/1994
|
|
Title:
|
AUTOMATIC REJECTION OF DIFFRACTION EFFECTS IN THIN FILM METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/1997
|
Application #:
|
08453037
|
Filing Dt:
|
05/30/1995
|
|
Title:
|
LOCALIZED PLASMA ASSISTED CHEMICAL ETCHING THROUGH A MASK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/1997
|
Application #:
|
08504686
|
Filing Dt:
|
07/20/1995
|
|
Title:
|
PNEUMATIC POLISHING HEAD FOR CMP APPARATUS
|
|
