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Total properties:
37
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|
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Patent #:
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|
Issue Dt:
|
01/21/1986
|
Application #:
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06480030
|
Filing Dt:
|
03/29/1983
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|
Title:
|
METHOD AND APPARATUS FOR DEPOSITION OF TUNGSTEN SILICIDES
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|
|
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Patent #:
|
|
Issue Dt:
|
11/05/1985
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Application #:
|
06522638
|
Filing Dt:
|
08/11/1983
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|
Title:
|
COOLED OPTICAL WINDOW FOR SEMICONDUCTOR WAFER HEATING
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|
|
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Patent #:
|
|
Issue Dt:
|
11/12/1985
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Application #:
|
06568175
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Filing Dt:
|
01/05/1984
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Title:
|
WAFER HOLDING APPARATUS FOR ION IMPLANTATION
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|
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Patent #:
|
|
Issue Dt:
|
12/16/1986
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Application #:
|
06590117
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Filing Dt:
|
03/16/1984
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Title:
|
PROCESS FOR DEPOSITING A LOW RESISTIVITY TUNGSTEN SILICON COMPOSITE FILM ON A SUBSTRATE
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|
|
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Patent #:
|
|
Issue Dt:
|
07/01/1986
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Application #:
|
06658738
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Filing Dt:
|
10/09/1984
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|
Title:
|
NON-MAGNETIC SPUTTERING TARGET
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|
|
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Patent #:
|
|
Issue Dt:
|
07/14/1987
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Application #:
|
06756739
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Filing Dt:
|
07/19/1985
|
|
Title:
|
COOLED OPTICAL WINDOW FOR SEMICONDUCTOR WAFER HEATING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/08/1987
|
Application #:
|
06759464
|
Filing Dt:
|
07/26/1985
|
|
Title:
|
CHARGE CONVERSION UNIT FOR NEGATIVE ION SOURCE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/14/1987
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Application #:
|
06782460
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Filing Dt:
|
10/01/1985
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|
Title:
|
SUPPLEMENTAL ELECTRIC WATER HEATER UNIT FOR COOLING OF A HOT WATER SUPPLY LINE
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|
|
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|
Patent #:
|
|
Issue Dt:
|
09/01/1987
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Application #:
|
06832836
|
Filing Dt:
|
02/24/1986
|
|
Title:
|
INTERLAYER DIELECTRIC PROCESS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/1988
|
Application #:
|
06919313
|
Filing Dt:
|
10/15/1986
|
|
Title:
|
SEMICONDUCTOR SUBSTRATE HEATER AND REACTOR PROCESS AND APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/1988
|
Application #:
|
06922319
|
Filing Dt:
|
10/23/1986
|
|
Title:
|
ION IMPLANTATION WITH VARIABLE IMPLANT ANGLE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/1989
|
Application #:
|
06926968
|
Filing Dt:
|
11/04/1986
|
|
Title:
|
LOW RESISTIVITY TUNGSTEN SILICON COMPOSITE FILM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/1988
|
Application #:
|
07000703
|
Filing Dt:
|
01/06/1987
|
|
Title:
|
THREATING WORKPIECES WITH BEAMS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/1989
|
Application #:
|
07038540
|
Filing Dt:
|
04/15/1987
|
|
Title:
|
DIAL DEPOSITION AND PROCESSING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/1990
|
Application #:
|
07251108
|
Filing Dt:
|
09/29/1988
|
|
Title:
|
SEMICONDUCTOR SUBSTRATE TREATING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/1990
|
Application #:
|
07251115
|
Filing Dt:
|
09/29/1988
|
|
Title:
|
SEMICONDUCTOR SUBSTRATE HEATER AND REACTOR PROCESS AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/1990
|
Application #:
|
07323199
|
Filing Dt:
|
03/13/1989
|
|
Title:
|
METHOD AND APPARATUS FOR DEPOSITION OF TUNGSTEN SILICIDES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/1990
|
Application #:
|
07354636
|
Filing Dt:
|
05/18/1989
|
|
Title:
|
PERIMETER WAFER SEAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/1990
|
Application #:
|
07474376
|
Filing Dt:
|
02/02/1990
|
|
Title:
|
PRECISION ULTRA-SENSITIVE TRACE DETECTOR FOR CARBON-14 WHEN IT IS AT CONCENTRATIONS CLOSE TO THAT PRESENT IN RECENT ORGANIC MATERIALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/1990
|
Application #:
|
07474476
|
Filing Dt:
|
02/02/1990
|
|
Title:
|
RUTHERFORD BACKSCATTERING SURFACE ANALYZER WITH 180-DEGREE DEFLECTING AND FOCUSING PERMANENT MAGNET
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/10/1992
|
Application #:
|
07596512
|
Filing Dt:
|
10/12/1990
|
|
Title:
|
DIFFERENTIAL PRESSURE CVD CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/1993
|
Application #:
|
07671164
|
Filing Dt:
|
03/14/1991
|
|
Title:
|
COMPOSITE SPUTTERING TARGET STRUCTURES AND PROCESS FOR PRODUCING SUCH STRUCTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/1992
|
Application #:
|
07776598
|
Filing Dt:
|
10/11/1991
|
|
Title:
|
ION SOURCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/1995
|
Application #:
|
07830603
|
Filing Dt:
|
02/04/1992
|
|
Title:
|
INTERCHANGEABLE CVD CHUCK SURFACE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/1995
|
Application #:
|
07849488
|
Filing Dt:
|
03/11/1992
|
|
Title:
|
DIFFERENTIAL PRESSURE CVD CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/15/1994
|
Application #:
|
07867299
|
Filing Dt:
|
04/10/1992
|
|
Title:
|
METHOD OF SELECTIVE ETCHING NATIVE OXIDE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/1995
|
Application #:
|
07902995
|
Filing Dt:
|
06/23/1992
|
|
Title:
|
PURGE GAS IN WAFER COATING AREA SELECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/1994
|
Application #:
|
07938303
|
Filing Dt:
|
08/27/1992
|
|
Title:
|
SACRIFICIAL METAL ETCHBACK SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/07/1995
|
Application #:
|
07950088
|
Filing Dt:
|
09/22/1992
|
|
Title:
|
FILM UNIFORMITY BY SELECTIVE PRESSURE GRADIENT CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/1994
|
Application #:
|
07958077
|
Filing Dt:
|
10/07/1992
|
|
Title:
|
METHOD OF MONITORING ION BEAM CURRENT IN ION IMPLANTATION APPARATUS FOR USE IN MANUFACTURING SEMICONDUCTORS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/1993
|
Application #:
|
07973841
|
Filing Dt:
|
11/09/1992
|
|
Title:
|
LOW-TEMPERATURE LOW-STRESS BLANKET TUNGSTEN FILM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/1994
|
Application #:
|
08033286
|
Filing Dt:
|
03/16/1993
|
|
Title:
|
PRODUCTION OF HIGH BEAM CURRENTS AT LOW ENERGIES FOR USE IN ION IMPLANTATION SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/1996
|
Application #:
|
08125117
|
Filing Dt:
|
09/21/1993
|
|
Title:
|
SCAN TECHNIQUE TO REDUCE TRANSIENT WAFER TEMPERATURES DURING ION IMPLANTATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/1996
|
Application #:
|
08343116
|
Filing Dt:
|
11/22/1994
|
|
Title:
|
METHOD OF CONSTRUCTING CMOS VERTICALLY MODULATED WELLS (VMW) BY CLUSTERED MEV BILLI (BURIED IMPLANTED LAYER FOR LATERAL ISOLATION) IMPLANTATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/1998
|
Application #:
|
08617293
|
Filing Dt:
|
03/18/1996
|
|
Title:
|
SEMICONDUCTOR DEVICE HAVING AT LEAST ONE FIELD OXIDE AREA AND CMOS VERTICALLY MODULATED WELLS (VMW) WITH A BURIED IMPLANTED LAYER FOR LATERAL ISOLATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/1998
|
Application #:
|
08822537
|
Filing Dt:
|
03/19/1997
|
|
Title:
|
METHOD FOR CMOS LATCH-UP IMPROVEMENT BY MEV BILLI (BURIED IMPLANTED LAYER FOR LATERAL ISOLATION) PLUS BURIED LAYER IMPLANTATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/1998
|
Application #:
|
08822543
|
Filing Dt:
|
03/19/1997
|
|
Title:
|
CHARGE EXCHANGE CELL
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|
