Patent Assignment Details
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| Reel/Frame: | 008817/0974 | |
| Pages: | 5 |
| | Recorded: | 11/06/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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08965658
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Filing Dt:
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11/06/1997
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Title:
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ELIMINATION OF TITANIUM NITRIDE FILM DEPOSITION IN TUNGSTEN PLUG TECHNOLOGY USING PE-CVD-TI AND IN-SITU PLASMA NITRIDATION
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Assignee
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| 6-7-35 KITASHINAGAWA SHINAGAWA-KU, 141 |
| TOKYO, JAPAN |
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Correspondence name and address
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WOOD, HERRON & EVANS, L.L.P.
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STEPHEN W. BARNS, ESQUIRE
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2700 CAREW TOWER
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441 VINE STREET
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CINCINNATI, OHIO 45202
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