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Patent #:
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Issue Dt:
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04/15/1980
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Application #:
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05957698
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Filing Dt:
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11/06/1978
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Title:
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MAGNETRON SPUTTERING TARGET AND CATHODE ASSEMBLY
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Patent #:
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Issue Dt:
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09/18/1984
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Application #:
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06316433
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Filing Dt:
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10/29/1981
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Title:
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FOCUSING MAGNETRON SPUTTERING APPARATUS
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Patent #:
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Issue Dt:
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12/27/1983
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Application #:
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06342976
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Filing Dt:
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01/26/1982
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Title:
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MAGNETICALLY ENHANCED PLASMA PROCESS AND APPARATUS
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Patent #:
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Issue Dt:
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04/08/1986
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Application #:
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06461022
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Filing Dt:
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01/26/1983
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Title:
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SHAPED FIELD MAGNETRON ELECTRODE
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Patent #:
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Issue Dt:
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01/31/1984
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Application #:
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06497798
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Filing Dt:
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05/25/1983
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Title:
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FOCUSING MAGNETRON SPUTTERING APPARATUS
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Patent #:
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Issue Dt:
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05/06/1986
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Application #:
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06507572
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Filing Dt:
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06/24/1983
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Title:
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METHOD OF MAKING CERAMIC TAPES
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Patent #:
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Issue Dt:
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06/25/1985
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Application #:
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06555449
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Filing Dt:
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11/28/1983
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Title:
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MAGNETRON REACTIVE BIAS SPUTTERING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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12/30/1986
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Application #:
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06762231
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Filing Dt:
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08/05/1985
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Title:
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CVD PLASMA REACTOR
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Patent #:
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Issue Dt:
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12/30/1986
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Application #:
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06762240
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Filing Dt:
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08/05/1985
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Title:
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CVD TEMPERATURE CONTROL
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Patent #:
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Issue Dt:
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02/03/1987
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Application #:
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06762355
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Filing Dt:
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08/05/1985
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Title:
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CVD HEAT SOURCE
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Patent #:
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Issue Dt:
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08/26/1986
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Application #:
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06762757
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Filing Dt:
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08/06/1985
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Title:
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CVD HEATER CONTROL CIRCUIT
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Patent #:
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Issue Dt:
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04/14/1987
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Application #:
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06802896
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Filing Dt:
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11/29/1985
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Title:
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DIVERTER MAGNET ARRANGEMENT FOR PLASMA PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/23/1991
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Application #:
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06901905
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Filing Dt:
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08/29/1986
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Title:
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DATA ACQUISITION WITH VERNIER CONTROL
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Patent #:
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Issue Dt:
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11/29/1988
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Application #:
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07020278
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Filing Dt:
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03/02/1987
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Title:
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DIRECT WAFER TEMPERATURE CONTROL
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Patent #:
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Issue Dt:
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08/29/1989
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Application #:
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07049489
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Filing Dt:
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05/14/1987
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Title:
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VACUUM LOAD LOCK
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Patent #:
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Issue Dt:
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10/03/1989
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Application #:
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07095560
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Filing Dt:
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09/10/1987
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Title:
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METHOD AND APPARATUS FOR IMPROVING THE UNIFORMITY ION BOMBARDMENT IN A MAGNETRON SPUTTERING SYSTEM
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Patent #:
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Issue Dt:
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01/28/1992
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Application #:
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07164746
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Filing Dt:
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03/07/1988
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Title:
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PROCESS CONTROL WITH GUARD BAND AND FAULT LIMIT
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Patent #:
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Issue Dt:
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03/20/1990
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Application #:
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07222327
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Filing Dt:
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07/20/1988
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Title:
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METHOD AND APPARATUS FOR HANDLING AND PROCESSING WAFER-LIKE MATERIALS
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Patent #:
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Issue Dt:
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04/10/1990
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Application #:
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07222328
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Filing Dt:
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07/20/1988
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Title:
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METHOD AND APPARATUS FOR HANDLING AND PROCESSING WAFER-LIKE MATERIALS
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Patent #:
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Issue Dt:
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09/18/1990
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Application #:
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07339308
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Filing Dt:
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04/17/1989
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Title:
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METHOD AND APPARATUS FOR SPUTTER COATING STEPPED WAFERS
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Patent #:
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Issue Dt:
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02/19/1991
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Application #:
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07415083
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Filing Dt:
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09/29/1989
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Title:
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PLANARIZATION METHOD
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Patent #:
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Issue Dt:
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03/31/1992
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Application #:
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07512662
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Filing Dt:
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04/20/1990
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Title:
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SUPPORTING AND TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/24/1991
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Application #:
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07519845
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Filing Dt:
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05/07/1990
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Title:
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ELEVATING TABLE AND TRANSPORTING METHOD
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Patent #:
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Issue Dt:
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06/30/1992
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Application #:
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07570943
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Filing Dt:
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08/22/1990
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Title:
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SPUTTER COATING PROCESS CONTROL METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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01/14/1992
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Application #:
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07572850
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Filing Dt:
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08/24/1990
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Title:
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METHOD OF IMPROVING ION FLUX DISTRIBUTION UNIFORMITY ON A SUBSTRATE
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Patent #:
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Issue Dt:
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08/24/1993
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Application #:
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07573845
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Filing Dt:
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08/28/1990
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Title:
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METHOD AND APPARATUS FOR REDUCING PARTICULATE CONTAMINATION
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Patent #:
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Issue Dt:
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07/14/1992
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Application #:
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07626987
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Filing Dt:
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12/13/1990
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Title:
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MAGNETRON SPUTTER COATING METHOD AND APPARATUS WITH ROTATING MAGNET CATHODE
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Patent #:
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Issue Dt:
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10/13/1992
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Application #:
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07701771
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Filing Dt:
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05/17/1991
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Title:
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SEMICONDUCTOR WAFER PROCESSING MODULE HAVING AN INCLINED ROTATING WAFER HANDLING TURRET AND A METHOD OF USING THE MODULE
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Patent #:
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Issue Dt:
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11/09/1993
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Application #:
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07701800
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Filing Dt:
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05/17/1991
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Title:
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WAFER PROCESSING CLUSTER TOOL BATCH PREHEATING AND DEGASSING APPARATUS
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Patent #:
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Issue Dt:
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04/27/1993
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Application #:
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07714864
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Filing Dt:
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06/13/1991
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Title:
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METHOD OF PREVENTING CONDENSATION OF AIR BORNE MOISTURE ONTO OBJECTS IN A VESSEL DURING PUMPING THEREOF
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Patent #:
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Issue Dt:
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12/29/1992
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Application #:
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07814320
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Filing Dt:
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12/23/1991
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Title:
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METHOD OF ENHANCING THE PERFORMANCE OF A MAGNETRON SPUTTERNG TARGET
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Patent #:
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Issue Dt:
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06/29/1993
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Application #:
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07816030
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Filing Dt:
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12/30/1991
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Title:
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EXTENDED LIFETIME COLLIMATOR
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Patent #:
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Issue Dt:
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04/25/1995
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Application #:
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07816137
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Filing Dt:
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12/31/1991
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Title:
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TARGET COOLING AND SUPPORT FOR MAGNETRON SPUTTER COATING APPARAUS
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Patent #:
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Issue Dt:
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09/27/1994
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Application #:
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07869241
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Filing Dt:
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04/15/1992
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Title:
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SEMICONDUCTOR WAFER TEMPERATURE DETERMINATION BY OPTICAL MEASUREMENT OF WAFER EXPANSION IN PROCESSING APPARATUS CHAMBER
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Patent #:
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Issue Dt:
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10/04/1994
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Application #:
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07869465
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Filing Dt:
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04/15/1992
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Title:
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PYROMETER TEMPERATURE MEASUREMENT OF PLURAL WAFERS STACKED IN A PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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07/18/1995
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Application #:
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07898492
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Filing Dt:
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06/15/1992
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Title:
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METHODS OF CHEMICAL VAPOR DEPOSITION (CVD) OF TUNGSTEN FILMS ON PATTERNED WAFER SUBSTRATES
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Patent #:
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Issue Dt:
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12/28/1993
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Application #:
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07898560
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Filing Dt:
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06/15/1992
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Title:
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SEMICONDUCTOR WAFER PROCESSING CVD REACTOR APPARATUS COMPRISING CONTOURED ELECTRODE GAS DIRECTING MEANS
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Patent #:
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Issue Dt:
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08/30/1994
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Application #:
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07898565
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Filing Dt:
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06/15/1992
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Title:
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METHOD OF NUCLEATING TUNGSTEN ON TITANIUM NITRIDE BY CVD WITHOUT SILANNE
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Patent #:
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Issue Dt:
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10/18/1994
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Application #:
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07898800
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Filing Dt:
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06/15/1992
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Title:
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SEMICONDUCTOR WAFER PROCESSING METHOD AND APPARATUS WITH HEAT AND GAS FLOW CONTROL
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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07898826
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Filing Dt:
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06/15/1992
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Title:
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ROTATING SUSCEPTOR SEMICONDUCTOR WAFER PROCESSING CLUSTER TOOL MODULE USEFUL FOR TUNGSTEN CVD
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Patent #:
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Issue Dt:
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12/21/1993
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Application #:
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07976516
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Filing Dt:
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11/16/1992
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Title:
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ELIMINATION OF LOW TEMPERATURE AMMONIA SALTS IN TICL4 NH3 CVD REACTION
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Patent #:
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Issue Dt:
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05/14/1996
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Application #:
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07985300
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Filing Dt:
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12/04/1992
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Title:
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WAFER PROCESSING MACHINE VACUUM FRONT END METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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03/22/1994
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Application #:
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07996102
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Filing Dt:
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12/23/1992
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Title:
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WAFER TRANSPORT MODULE WITH ROTATABLE AND HORIZONTALLY EXTENDABLE WAFER HOLDER
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Patent #:
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Issue Dt:
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10/25/1994
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Application #:
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08018769
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Filing Dt:
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02/17/1993
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Title:
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FILLING OF VIAS AND CONTACTS EMPLOYING AN ALUMINUM-GERMANIUM ALLOY
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Patent #:
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Issue Dt:
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02/21/1995
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Application #:
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08045368
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Filing Dt:
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04/09/1993
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Title:
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PLASMA SHAPING PLUG FOR CONTROL OF SPUTTER ETCHING
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Patent #:
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Issue Dt:
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11/01/1994
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Application #:
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08047265
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Filing Dt:
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04/13/1993
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Title:
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METHOD FOR PLANARIZATION OF SUBMICRON VIAS AND THE MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUITS
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Patent #:
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Issue Dt:
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01/18/1994
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Application #:
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08050726
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Filing Dt:
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04/16/1993
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Title:
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CLUSTER TOOL SOFT ETCH MODULE AND ECR PLASMA GENERATOR THEREFORE
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Patent #:
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Issue Dt:
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04/18/1995
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Application #:
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08052888
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Filing Dt:
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04/26/1993
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Title:
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SELF ALIGNING IN-SITU ELLIPSOMETER AND METHOD OF USING FOR PROCESS MONITORING
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Patent #:
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Issue Dt:
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09/13/1994
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Application #:
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08060315
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Filing Dt:
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05/11/1993
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Title:
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SPUTTER COATING COLLIMATOR WITH INTEGRAL REACTIVE GAS DISTRIBUTION
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Patent #:
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Issue Dt:
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01/03/1995
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Application #:
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08092004
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Filing Dt:
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07/15/1993
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Title:
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SPIRAL MAGNETIC LINEAR TRANSLATING MECHANISM
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Patent #:
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Issue Dt:
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10/03/1995
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Application #:
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08093058
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Filing Dt:
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07/16/1993
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Title:
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CONTROL OF THE CRYSTAL ORIENTATION DEPENDENT PROPERTIES OF A FILM DEPOSITED ON A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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05/16/1995
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Application #:
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08095950
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Filing Dt:
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07/22/1993
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Title:
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STATIONARY APERTURE PLATE FOR REACTIVE SPUTTER DEPOSITION
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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08117443
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Filing Dt:
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09/07/1993
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Title:
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SOFT PLASMA IGNITION IN PLASMA PROCESSING CHAMBERS
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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08124332
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Filing Dt:
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09/21/1993
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Title:
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IMMERSION TESTING POROUS SEMICONDUCTOR PROCESSING COMPONENTS
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Patent #:
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Issue Dt:
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01/03/1995
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Application #:
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08131900
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Filing Dt:
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10/05/1993
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Title:
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METHOD FOR CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE FILMS AT LOW TEMPERATURES
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Patent #:
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Issue Dt:
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09/20/1994
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Application #:
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08133582
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Filing Dt:
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10/07/1993
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Title:
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APPARATUS FOR ELIMINATION OF LOW TEMPERATURE AMMONIA SALTS IN TICL4 NH3 CVD REACTION
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Patent #:
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Issue Dt:
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01/10/1995
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Application #:
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08147666
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Filing Dt:
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11/03/1993
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Title:
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WAFER PROCESSING CLUSTER TOOL BATCH PREHEATING AND DEGASSING METHOD
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Patent #:
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Issue Dt:
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07/15/1997
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Application #:
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08166745
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Filing Dt:
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12/14/1993
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Title:
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GAS DIFFUSER PLATE ASSEMBLY AND RF ELECTRODE
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Patent #:
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Issue Dt:
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04/09/1996
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Application #:
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08214367
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Filing Dt:
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03/17/1994
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Title:
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CHAMBER TEMPERATURE UNIFORMITY TEST FIXTURE
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Patent #:
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Issue Dt:
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09/19/1995
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Application #:
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08241184
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Filing Dt:
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05/11/1994
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Title:
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APPARATUS AND METHOD FOR IMPROVED DELIVERY OF VAPORIZED REACTANT GASES TO A REACTION CHAMBER
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08241192
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Filing Dt:
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05/11/1994
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Title:
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THERMAL CYCLE RESISTANT SEAL AND METHOD OF SEALING FOR USE WITH SEMICONDUCTOR WAFER PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08253393
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Filing Dt:
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06/03/1994
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Title:
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METHOD FOR PRODUCING TITANIUM-CONTAINING THIN FILMS BY LOW TEMPERATURE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION USING A ROTATING SUSCEPTOR REACTOR
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Patent #:
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Issue Dt:
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05/13/1997
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Application #:
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08253714
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Filing Dt:
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06/03/1994
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Title:
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METHOD AND APPARATUS FOR LOW TEMPERATURE DEPOSITION OF CVD AND PECVD FILMS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08253978
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Filing Dt:
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06/03/1994
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Title:
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LOW TEMPERATURE PLASMA-ENHANCED FORMATION OF INTEGRATED CIRCUITS
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Patent #:
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Issue Dt:
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01/21/1997
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Application #:
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08319884
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Filing Dt:
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10/07/1994
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Title:
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WAFER HEATING CHUCK WITH DUAL ZONE BACKPLANE HEATING AND SEGMENTED CLAMPING MEMBER
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Patent #:
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Issue Dt:
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10/29/1996
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Application #:
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08326743
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Filing Dt:
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10/25/1994
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Title:
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INDUCTIVELY COUPLED PLASMA SPUTTER CHAMBER WITH CONDUCTIVE MATERIAL SPUTTERING CAPABILITIES
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08336496
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Filing Dt:
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11/09/1994
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Title:
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METHOD AND APPARATUS FOR ISOLALTING A SUSCEPTOR HEATING ELEMENT FROM A CHEMICAL VAPOR DEPOSITION ENVIRONMENT
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Patent #:
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Issue Dt:
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12/17/1996
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Application #:
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08382384
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Filing Dt:
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02/01/1995
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Title:
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PLASMA NOISE AND ARCING SUPPRESSOR APPARATUS AND METHOD FOR SPUTTER DEPOSITION
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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08390226
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Filing Dt:
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02/17/1995
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Title:
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TRANSPORT SYSTEM FOR WAFER PROCESSING LINE
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Patent #:
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Issue Dt:
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10/29/1996
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Application #:
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08398743
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Filing Dt:
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03/06/1995
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Title:
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METHOD AND APPARATUS FOR COOLING A SPUTTERING TARGET
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Patent #:
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Issue Dt:
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09/17/1996
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Application #:
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08410362
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Filing Dt:
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03/24/1995
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Title:
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SPUTTER ETCHING APPARATUS WITH PLASMA SOURCE HAVING A DIELECTRIC POCKET AND CONTOURED PLASMA SOURCE
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Patent #:
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Issue Dt:
|
02/10/2004
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Application #:
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08439490
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Filing Dt:
|
05/11/1995
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Title:
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SPUTTERING APPARATUS WITH ISOLATED COOLANT AND SPUTTERING TARGET THEREFOR
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Patent #:
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|
Issue Dt:
|
06/01/1999
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Application #:
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08453382
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Filing Dt:
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05/30/1995
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Title:
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GAS DIFFUSER PLATE ASSEMBLY AND RF ELECTRODE
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|
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Patent #:
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|
Issue Dt:
|
05/28/1996
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Application #:
|
08455636
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Filing Dt:
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05/31/1995
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Title:
|
ULTRASONIC ENHANCEMENT OF ALUMINUM STEP COVERAGE AND APPARATUS
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Patent #:
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|
Issue Dt:
|
10/22/1996
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Application #:
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08461665
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Filing Dt:
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06/05/1995
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Title:
|
PROCESS FOR PLASMA ENHANCED ANNEAL OF TITANIUM NITRIDE
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Patent #:
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Issue Dt:
|
10/22/1996
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Application #:
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08468350
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Filing Dt:
|
06/06/1995
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|
Title:
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APPARATUS FOR PRODUCING THIN FILMS BY LOW TEMPERATURE PLASMA- ENHANCED CHEMICAL VAPOR DEPOSITION USING A ROTATING SUSCEPTOR REACTOR
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|
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Patent #:
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|
Issue Dt:
|
11/12/1996
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Application #:
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08478950
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Filing Dt:
|
06/07/1995
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|
Title:
|
PLASMA PROCESSING SYSTEM WITH REDUCED PARTICLE CONTAMINATION
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Patent #:
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|
Issue Dt:
|
12/31/1996
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Application #:
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08488060
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Filing Dt:
|
06/07/1995
|
|
Title:
|
PLASMA SPUTTER ETCHING SYSTEM WITH REDUCED PARTICLE CONTAMINATION
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|
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Patent #:
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|
Issue Dt:
|
09/08/1998
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Application #:
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08488063
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Filing Dt:
|
06/07/1995
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Title:
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WAFER SUPPORT STRUCTURE FOR A WAFER BACKPLANE WITH A CURVED SURFACE
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Patent #:
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Issue Dt:
|
10/26/1999
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Application #:
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08489040
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Filing Dt:
|
06/09/1995
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Title:
|
METHOD FOR FORMING SALICIDES
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Patent #:
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|
Issue Dt:
|
07/09/2002
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Application #:
|
08505739
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Filing Dt:
|
07/24/1995
|
|
Title:
|
METHOD AND APPARATUS FOR SPUTTER COATING WITH VARIABLE TARGET TO SUBSTRATE SPACING
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|
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|
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Patent #:
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|
Issue Dt:
|
09/28/1999
|
Application #:
|
08566504
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Filing Dt:
|
12/04/1995
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|
Title:
|
PROCESS EQUIPMENT WITH SIMULTANEOUS OR SEQUENTIAL DEPOSITION AND ETCHING CAPABILITIES
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|
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Patent #:
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|
Issue Dt:
|
04/15/1997
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Application #:
|
08583200
|
Filing Dt:
|
01/04/1996
|
|
Title:
|
SPUTTERING APPARTUS HAVINF AN ON BOARD SERVICE MODULE
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|
|
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|
Patent #:
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|
Issue Dt:
|
10/31/2000
|
Application #:
|
08615453
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Filing Dt:
|
03/14/1996
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|
Title:
|
METHOD AND APPARATUS FOR LOW TEMPERATURE DEPOSITION OF CVD AND PECVD FILMS
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|
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|
Patent #:
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|
Issue Dt:
|
04/27/1999
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Application #:
|
08615454
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Filing Dt:
|
03/14/1996
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Title:
|
METHOD FOR ISOLATING A SUSCEPTOR HEATING ELEMENT FROM A CHEMICAL VAPOR DEPOSITION ENVIRONMENT
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|
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Patent #:
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|
Issue Dt:
|
09/23/1997
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Application #:
|
08624010
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Filing Dt:
|
03/27/1996
|
|
Title:
|
PLASMA PRODUCING METHOD AND APPARATUS INCLUDING AN INDUCTIVELY-COUPLED PLASMA SOURCE
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|
|
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|
Patent #:
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|
Issue Dt:
|
02/10/1998
|
Application #:
|
08720621
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Filing Dt:
|
10/02/1996
|
|
Title:
|
METHOD FOR PRODUCING TITANIUM THIN FILMS BY LOW TEMPERATURE PLASMA- ENHANCED CHEMICAL VAPOR DEPOSITION USING A ROTATING SUSCEPTOR REACTOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/21/1998
|
Application #:
|
08734207
|
Filing Dt:
|
10/21/1996
|
|
Title:
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SPUTTERING CATHODE WITH UNIFORMITY COMPENSATION
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|
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|
Patent #:
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|
Issue Dt:
|
12/07/1999
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Application #:
|
08756022
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Filing Dt:
|
11/26/1996
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Title:
|
PROCESS FOR SETTING A WORKING RATE DISTRIBUTION IN AN ETCHING OR PLASMA CVD APPARATUS
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Patent #:
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Issue Dt:
|
11/10/1998
|
Application #:
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08791954
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Filing Dt:
|
01/31/1997
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Title:
|
METHOD AND APPARATUS FOR PREPARING AND METALLIZING HIGH ASPECT RATIO SILICON SEMICONDUCTOR DEVICE CONTACTS TO REDUCE THE RESISTIVITY THEREOF
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Patent #:
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Issue Dt:
|
11/23/1999
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Application #:
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08791955
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Filing Dt:
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01/31/1997
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Title:
|
METHOD OF LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF TIN FILM OVER TITANIUM FOR USE IN VIA LEVEL APPLICATIONS
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Patent #:
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|
Issue Dt:
|
05/25/1999
|
Application #:
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08797397
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Filing Dt:
|
02/10/1997
|
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Title:
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PROCESS FOR CHEMICAL VAPOR DEPOSITION OF TUNGSTEN ONTO A TITANIUM NITRIDE SUBSTRATE SURFACE
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Patent #:
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Issue Dt:
|
02/06/2001
|
Application #:
|
08810359
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Filing Dt:
|
03/03/1997
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Title:
|
APPARATUS FOR THERMAL CONTROL OF VARIOUSLY SIZED ARTICLES IN VACUUM
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Patent #:
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Issue Dt:
|
10/15/2002
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Application #:
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08812091
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Filing Dt:
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03/04/1997
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|
Title:
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CATHODE HAVING VARIABLE MAGNET CONFIGURATION
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|
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Patent #:
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|
Issue Dt:
|
07/20/1999
|
Application #:
|
08820818
|
Filing Dt:
|
03/19/1997
|
|
Title:
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APPARATUS AND METHOD FOR CLAMPING A SUBSTRATE
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|
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Patent #:
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|
Issue Dt:
|
10/13/1998
|
Application #:
|
08827690
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Filing Dt:
|
04/10/1997
|
|
Title:
|
VACUUM PROCESSING APPARATUS WITH LOW PARTICLE GENERATING WAFER CLAMP
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|
Patent #:
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|
Issue Dt:
|
09/01/1998
|
Application #:
|
08837551
|
Filing Dt:
|
04/21/1997
|
|
Title:
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APPARATUS FOR IONIZED SPUTTERING
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Patent #:
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|
Issue Dt:
|
03/07/2000
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Application #:
|
08838383
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Filing Dt:
|
04/08/1997
|
|
Title:
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VACUUM PROCESSING APPARATUS WITH LOW PARTICLE GENERATING VACUUM SEAL
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Patent #:
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|
Issue Dt:
|
09/07/1999
|
Application #:
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08844757
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Filing Dt:
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04/21/1997
|
|
Title:
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METHOD AND APPARATUS FOR IONIZED SPUTTERING
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Patent #:
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|
Issue Dt:
|
08/31/1999
|
Application #:
|
08853172
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Filing Dt:
|
05/08/1997
|
|
Title:
|
MULTIPLE SINGLE-WAFER LOADLOCK WAFER PROCESSING APPARATUS AND LOADING AND UNLOADING METHOD THEREFOR
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