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Total properties:
17
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Patent #:
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Issue Dt:
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02/26/1980
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Application #:
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05858516
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Filing Dt:
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12/08/1977
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Title:
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MOVABLE DISPENSER
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Patent #:
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Issue Dt:
|
07/28/1981
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Application #:
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06060337
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Filing Dt:
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07/25/1979
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Title:
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METHOD AND APPARATUS FOR PROCESSING WORKPIECES
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Patent #:
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Issue Dt:
|
05/21/1985
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Application #:
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06507927
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Filing Dt:
|
06/27/1983
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Title:
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SPLASH RETARDER
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Patent #:
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Issue Dt:
|
06/03/1986
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Application #:
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06612611
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Filing Dt:
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05/21/1984
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Title:
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PROCESSING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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02/24/1987
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Application #:
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06652643
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Filing Dt:
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09/21/1984
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Title:
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SOLAR HEATER CONTROL
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Patent #:
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Issue Dt:
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08/11/1987
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Application #:
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06735863
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Filing Dt:
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05/20/1985
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Title:
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PROCESS APPARATUS AND METHOD AND ELEVATOR MECHANISM FOR USE IN C0NNECTION THEREWITH
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Patent #:
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Issue Dt:
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12/08/1987
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Application #:
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06848806
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Filing Dt:
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04/04/1986
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Title:
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BALANCING CHUCK
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Patent #:
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Issue Dt:
|
02/02/1988
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Application #:
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06865251
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Filing Dt:
|
05/19/1986
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Title:
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MODULAR PROCESSING APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS
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|
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Patent #:
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Issue Dt:
|
01/05/1988
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Application #:
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06907578
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Filing Dt:
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09/15/1986
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Title:
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SYSTEM AND METHOD FOR PROCESSING WORKPIECES
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Patent #:
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Issue Dt:
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07/12/1988
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Application #:
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06938043
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Filing Dt:
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12/04/1986
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Title:
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DEPOSITION AND PLANARIZING METHODS AND APPARATUS
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|
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Patent #:
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Issue Dt:
|
04/04/1989
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Application #:
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07047200
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Filing Dt:
|
05/06/1987
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Title:
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THIN FILM DEPOSITION APPARATUS AND METHOD
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|
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Patent #:
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Issue Dt:
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08/01/1989
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Application #:
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07091651
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Filing Dt:
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09/01/1987
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Title:
|
MODULAR PROCESSING APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS
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|
|
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Patent #:
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|
Issue Dt:
|
08/15/1989
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Application #:
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07252762
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Filing Dt:
|
10/03/1988
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Title:
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APPARATUS AND METHOD FOR THE FLUID TREATMENT OF A WORKPIECE
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|
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Patent #:
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Issue Dt:
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05/19/1992
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Application #:
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07457347
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Filing Dt:
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12/27/1989
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Title:
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DEPOSITION APPARATUS AND METHOD FOR ENHANCING STEP COVERAGE AND PLANARIZATION ON SEMICONDUCTOR WAFERS
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|
|
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Patent #:
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Issue Dt:
|
03/10/1992
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Application #:
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07513545
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Filing Dt:
|
04/24/1990
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|
Title:
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METHOD AND APPARATUS FOR APPLYING A LAYER OF A FLUID MATERIAL ON A SEMICONDUCTOR WAFER `
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|
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Patent #:
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Issue Dt:
|
03/18/1997
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Application #:
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08531195
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Filing Dt:
|
09/19/1995
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Title:
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PROCESS CHAMBER FOR SEMICONDUCTOR SUBSTRATES
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|
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Patent #:
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Issue Dt:
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05/05/1998
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Application #:
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08589554
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Filing Dt:
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01/22/1996
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Title:
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ROBOTIC WAFER HANDLER
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