|
Total properties:
33
|
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
06040604
|
Filing Dt:
|
|
|
Title:
|
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/21/1981
|
Application #:
|
06051661
|
Filing Dt:
|
06/25/1979
|
|
Title:
|
METHOD FOR PROCESS CONTROL OF A PLASMA REACTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/1982
|
Application #:
|
06205402
|
Filing Dt:
|
11/10/1980
|
|
Title:
|
APPARATUS FOR CONTROLLING A PLASMA REACTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/1984
|
Application #:
|
06538593
|
Filing Dt:
|
10/03/1983
|
|
Title:
|
PLASMA REACTOR APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/1986
|
Application #:
|
06588027
|
Filing Dt:
|
03/09/1984
|
|
Title:
|
VACUUM LOAD LOCK APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/1986
|
Application #:
|
06588028
|
Filing Dt:
|
03/09/1984
|
|
Title:
|
PROCESS MONITOR AND METHOD THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/1989
|
Application #:
|
06588029
|
Filing Dt:
|
03/09/1984
|
|
Title:
|
MODULAR ARTICLE PROCESSING MACHINE AND METHOD OF ARTICLE HANDLING THEREIN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/1986
|
Application #:
|
06588030
|
Filing Dt:
|
03/09/1984
|
|
Title:
|
ARTICLE TRANSPORT APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/1986
|
Application #:
|
06658468
|
Filing Dt:
|
10/09/1984
|
|
Title:
|
PLASMA REACTOR REMOVABLE INSERT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/1986
|
Application #:
|
06665098
|
Filing Dt:
|
10/29/1984
|
|
Title:
|
PLASMA REACTOR APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/1986
|
Application #:
|
06707639
|
Filing Dt:
|
03/04/1985
|
|
Title:
|
VARIABLE DUTY CYCLE, MULTIPLE FREQUENCY, PLASMA REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/1986
|
Application #:
|
06743341
|
Filing Dt:
|
06/11/1985
|
|
Title:
|
PIN LIFT PLASMA PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/1987
|
Application #:
|
06832047
|
Filing Dt:
|
02/21/1986
|
|
Title:
|
SELECTIVE PLASMA ETCHING DURING FORMATION OF INTEGRATED CIRCUITRY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/1988
|
Application #:
|
06837036
|
Filing Dt:
|
03/06/1986
|
|
Title:
|
BODY PILLOW
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/1987
|
Application #:
|
06875820
|
Filing Dt:
|
06/18/1986
|
|
Title:
|
DUAL WAVELENGTH SENSOR WHICH EMPLOYS OBJECT AS PART OF A CORNER REFLECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/1988
|
Application #:
|
06923367
|
Filing Dt:
|
10/27/1986
|
|
Title:
|
OPTICAL PROCESS FOR DETERMINING THE END POINT OF A PROCESS VIA ANALOG MULTIPLICATION OF PHOTOCELL SIGNALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/1988
|
Application #:
|
07018770
|
Filing Dt:
|
03/02/1987
|
|
Title:
|
WAFER CASSETTS HAVING MULTI-DIRECTIONAL ACCDSS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/1988
|
Application #:
|
07034121
|
Filing Dt:
|
04/03/1987
|
|
Title:
|
MAGNETICALLY COUPLED WAFER LIFT PINS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/27/1988
|
Application #:
|
07045260
|
Filing Dt:
|
04/24/1987
|
|
Title:
|
PLASMA REACTOR WITH REMOVABLE INSERT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/25/1988
|
Application #:
|
07048344
|
Filing Dt:
|
05/11/1987
|
|
Title:
|
NON-UNIFORM GAS INLET FOR DRY ETCHING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/22/1988
|
Application #:
|
07065746
|
Filing Dt:
|
06/24/1987
|
|
Title:
|
XENON ENHANCED PLASMA ETCH
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/1989
|
Application #:
|
07185730
|
Filing Dt:
|
04/25/1988
|
|
Title:
|
SPATULA FOR WAFER TRANSPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/19/1989
|
Application #:
|
07319020
|
Filing Dt:
|
03/06/1989
|
|
Title:
|
IGNITOR FOR A MICROWAVE SUSTAINED PLASMA
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/1989
|
Application #:
|
07345795
|
Filing Dt:
|
05/01/1989
|
|
Title:
|
PLASMA ETCH ISOTROPY CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/15/1991
|
Application #:
|
07563742
|
Filing Dt:
|
08/03/1990
|
|
Title:
|
SPATULA FOR WAFER TRANSPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/1997
|
Application #:
|
08438261
|
Filing Dt:
|
05/10/1995
|
|
Title:
|
INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/1999
|
Application #:
|
08450369
|
Filing Dt:
|
05/25/1995
|
|
Title:
|
PLASMA ETCH SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2000
|
Application #:
|
08675093
|
Filing Dt:
|
07/03/1996
|
|
Title:
|
PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2002
|
Application #:
|
08675559
|
Filing Dt:
|
07/03/1996
|
|
Title:
|
PLASMA ETCH REACTOR AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2000
|
Application #:
|
08742861
|
Filing Dt:
|
11/01/1996
|
|
Title:
|
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/1999
|
Application #:
|
08850224
|
Filing Dt:
|
05/02/1997
|
|
Title:
|
PLASMA ETCH SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2000
|
Application #:
|
08974089
|
Filing Dt:
|
11/19/1997
|
|
Title:
|
A METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09086105
|
Filing Dt:
|
05/28/1998
|
|
Publication #:
|
|
Pub Dt:
|
05/24/2001
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR INCREASING WAFER THROUGHPUT BETWEEN CLEANINGS IN SEMICONDUCTOR PROCESSING REACTORS
|
|
