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Total properties:
13
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Patent #:
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Issue Dt:
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06/11/1985
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Application #:
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06567823
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Filing Dt:
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01/03/1984
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Title:
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DEVICE FOR PHOTOLITHOGRAPHICALLY TREATING A THIN SUBSTRATE
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Patent #:
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Issue Dt:
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06/25/1991
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Application #:
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06656218
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Filing Dt:
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10/01/1984
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Title:
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APPARATUS FOR PRE-ALIGNING SUBSTRATE PREPARATORY TO FINE ALIGMENT
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Patent #:
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Issue Dt:
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12/09/1986
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Application #:
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06741057
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Filing Dt:
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06/05/1985
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Title:
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POSITIONING DEVICE COMPRISING PRE-STRESSED CONTACT-LESS BEARINGS
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Patent #:
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Issue Dt:
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04/07/1987
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Application #:
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06838894
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Filing Dt:
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03/11/1986
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Title:
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DISPLACEMENT DEVICE, PARTICULARLY FOR THE PHOTOLITHOGRAPHIC TREATMENT OF A SUBSTRATE
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Patent #:
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Issue Dt:
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09/20/1988
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Application #:
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06918758
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Filing Dt:
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10/14/1986
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Title:
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DEVICE FOR DETECTING A MAGNIFICATION ERROR IN AN OPTICAL IMAGING SYSTEM
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Patent #:
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Issue Dt:
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04/04/1989
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Application #:
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07119462
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Filing Dt:
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11/09/1987
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Title:
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GUIDING DEVICE
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Patent #:
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Issue Dt:
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09/12/1989
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Application #:
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07157103
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Filing Dt:
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02/09/1988
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Title:
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OPTICAL IMAGING ARRANGEMENT COMPRISING AN OPTO-ELECTRONIC FOCUSSING- ERROR DETECTION SYSTEM
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Patent #:
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Issue Dt:
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12/15/1992
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Application #:
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07784286
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Filing Dt:
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10/29/1991
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Title:
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OPTICAL LITHOGRAPHIC DEVICE HAVING A MACHINE FRAME WITH FORCE COMPENSATION
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Patent #:
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Issue Dt:
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09/30/1997
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Application #:
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08450197
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Filing Dt:
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05/25/1995
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Title:
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METHOD OF REPETITIVELY IMAGING A MASK PATTERN ON A SUBSTRATE, AND APPARATUS FOR PERFORMING THE METHOD
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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08812283
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Filing Dt:
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03/06/1997
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Title:
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DIFFERENTIAL INTERFEROMETER SYSTEM AND LITHOGRAPHIC STEP-AND-SCAN APPARATUS PROVIDED WITH SUCH A SYSTEM
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08818143
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Filing Dt:
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03/13/1997
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Title:
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ALIGNMENT DEVICE AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A DEVICE
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09099505
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Filing Dt:
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06/18/1998
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Title:
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ALIGNMENT DEVICE AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A DEVICE
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09103733
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Filing Dt:
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06/24/1998
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Title:
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INTERFEROMETER SYSTEM WITH TWO WAVELENGHTS, AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A SYSTEM
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