Total properties:
10
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Patent #:
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Issue Dt:
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10/18/1988
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Application #:
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06910710
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Filing Dt:
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09/24/1986
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Title:
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METHOD OF ALIGNING A MASK AND A SUBSTRATE RELATIVE TO EACH OTHER AND ARRANGEMENT FOR CARRYING OUT THE METHOD
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07774763
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Filing Dt:
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10/09/1991
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Title:
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SUPPORT DEVICE WITH A TILTABLE OBJECT TABLE, AND OPTICAL LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A SUPPORT DEVICE
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Patent #:
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Issue Dt:
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09/22/1992
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Application #:
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07804577
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Filing Dt:
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12/10/1991
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Title:
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LITHOGRAPHIC DEVICE WITH A SUSPENDED OBJECT TABLE
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08637895
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Filing Dt:
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04/25/1996
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Title:
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POSITIONING DEVICE WITH A FORCE ACTUATOR SYSTEM FOR COMPENSATING CENTER-OF-GRAVITY DISPLACEMENTS, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08642010
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Filing Dt:
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05/02/1996
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Title:
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LITHOGRAPHIC DEVICE WITH A THREE-DIMENSIONALLY POSITIONABLE MASK HOLDER
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08642014
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Filing Dt:
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05/02/1996
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Title:
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POSITIONING DEVICE WITH A VIBRATION-FREE OBJECT TABLE, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08776418
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Filing Dt:
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01/30/1997
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Title:
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POSITIONING DEVICE WITH A REFERENCE FRAME FOR A MEASURING SYSTEM, AND A LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08948471
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Filing Dt:
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10/10/1997
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Title:
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TWO-DIMENSIONALLY BALANCED POSITIONING DEVICE WITH TWO OBJECT HOLDERS, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09103734
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Filing Dt:
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06/24/1998
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Title:
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POSITIONING DEVICE HAVING THREE COIL SYSTEMS MUTUALLY ENCLOSING ANGLES OF 120 DEGREE AND LITHOGRAPHIC PROJECTION APPARATUS COMPRISING SUCH A POSITIONING DEVICE
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09180011
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Filing Dt:
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10/29/1998
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Title:
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POSITIONING DEVICE HAVING TWO OBJECT HOLDERS
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