Patent Assignment Details
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Reel/Frame: | 014205/0323 | |
| Pages: | 2 |
| | Recorded: | 06/18/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10464597
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Filing Dt:
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06/18/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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VAPOR PHASE ETCHING MEMS DEVICES
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Assignee
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655 WEST RESERVE DRIVE |
KALISPELL, MONTANA 59901 |
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Correspondence name and address
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PERKINS COIE LLP
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KENNETH H. OHRINER
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P.O. BOX 1208
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SEATTLE, WA 98111-1208
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