|
Total properties:
28
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|
|
|
Patent #:
|
|
Issue Dt:
|
03/25/1986
|
Application #:
|
06612355
|
Filing Dt:
|
05/21/1984
|
|
Title:
|
VESSEL AND SYSTEM FOR TREATING WAFERS WITH FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/06/1987
|
Application #:
|
06747894
|
Filing Dt:
|
06/24/1985
|
|
Title:
|
APPARATUS FOR TREATING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/1988
|
Application #:
|
06747895
|
Filing Dt:
|
06/24/1985
|
|
Title:
|
VESSEL AND SYSTEM FOR TREATING WAFERS WITH FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/1988
|
Application #:
|
06765294
|
Filing Dt:
|
08/13/1985
|
|
Title:
|
PROCESS AND APPARATUS FOR TREATING WAFERS WITH PROCESS FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/1989
|
Application #:
|
06805203
|
Filing Dt:
|
12/04/1985
|
|
Title:
|
METHOD AND SYSTEM FOR FLUID TREATMENT OF SEMICONDUCTOR WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/1988
|
Application #:
|
06922882
|
Filing Dt:
|
10/24/1986
|
|
Title:
|
MRTHOD OF TREATING WAFERS WITH FLUID
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/1989
|
Application #:
|
07125245
|
Filing Dt:
|
11/25/1987
|
|
Title:
|
VESSEL AND SYSTEM FOR TREATING WAFERS WITH FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/1990
|
Application #:
|
07184544
|
Filing Dt:
|
04/20/1988
|
|
Title:
|
PROCESS AND APPARATUS FOR DRYING SURFACES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/1990
|
Application #:
|
07252823
|
Filing Dt:
|
10/03/1988
|
|
Title:
|
APPARATUS FOR TREATING WAFERS WITH PROCESS FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/1990
|
Application #:
|
07283465
|
Filing Dt:
|
12/12/1988
|
|
Title:
|
METHOD AND SYSTEM FOR FLUID TREATMENT OF SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/15/1991
|
Application #:
|
07431268
|
Filing Dt:
|
11/03/1989
|
|
Title:
|
APPARATUS FOR RINSING AND DRYING SURFACES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/1995
|
Application #:
|
08093116
|
Filing Dt:
|
07/16/1993
|
|
Title:
|
STATIC MEGASONIC CLEANING SYSTEM FOR CLEANING OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2000
|
Application #:
|
08684543
|
Filing Dt:
|
07/19/1996
|
|
Title:
|
WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS USING SEQUENTIAL CHEMICAL PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2000
|
Application #:
|
08881267
|
Filing Dt:
|
06/24/1997
|
|
Title:
|
METHOD FOR SULFURIC ACID RESIST STRIPPING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/26/1999
|
Application #:
|
09096898
|
Filing Dt:
|
06/12/1998
|
|
Title:
|
METHODS FOR TREATING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/17/2002
|
Application #:
|
09209101
|
Filing Dt:
|
12/10/1998
|
|
Title:
|
WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/07/2000
|
Application #:
|
09253629
|
Filing Dt:
|
02/19/1999
|
|
Title:
|
METHODS FOR TREATING OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2001
|
Application #:
|
09257488
|
Filing Dt:
|
02/25/1999
|
|
Title:
|
METHODS AND SYSTEMS FOR DETERMINING CHEMICAL CONCENTRATIONS AND CONTROLLING THE PROCESSING OF SEMICONDCTOR SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2001
|
Application #:
|
09324813
|
Filing Dt:
|
06/02/1999
|
|
Title:
|
WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS USINGLIQUIDS OF VARYING TEMPERATURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2000
|
Application #:
|
09395398
|
Filing Dt:
|
09/14/1999
|
|
Title:
|
ELECTROLESS METAL DEPOSITION OF ELECTRONIC COMPONENTS IN AN ENCLOSABLE VESSEL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/11/2003
|
Application #:
|
09478094
|
Filing Dt:
|
01/05/2000
|
|
Title:
|
METHOD FOR REDUCING PARTICLE CONTAMINATION DURING THE WET PROCESSING OF SEMICONDUCTOR SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09564358
|
Filing Dt:
|
04/19/2000
|
|
Title:
|
Pressure relief device and method of using the same
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/2002
|
Application #:
|
09669789
|
Filing Dt:
|
09/26/2000
|
|
Title:
|
METHODS FOR TREATING OBJECTS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09727661
|
Filing Dt:
|
12/01/2000
|
|
Publication #:
|
|
Pub Dt:
|
06/06/2002
| | | | |
|
Title:
|
Apparatus for providing ozonated process fluid and methods for using same
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2002
|
Application #:
|
09805348
|
Filing Dt:
|
03/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/21/2002
| | | | |
|
Title:
|
PROCESSES FOR TREATING ELECTRONIC COMPONENTS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09930009
|
Filing Dt:
|
08/15/2001
|
|
Publication #:
|
|
Pub Dt:
|
08/08/2002
| | | | |
|
Title:
|
SYSTEMS AND METHODS FOR FORMING PROCESSING STREAMS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10074516
|
Filing Dt:
|
02/13/2002
|
|
Publication #:
|
|
Pub Dt:
|
08/29/2002
| | | | |
|
Title:
|
Method for etching electronic components containing tantalum
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10163441
|
Filing Dt:
|
06/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
Methods and systems for monitoring process fluids
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|
