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Total properties:
14
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Patent #:
|
|
Issue Dt:
|
07/30/2002
|
Application #:
|
09554443
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Filing Dt:
|
05/10/2000
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|
Title:
|
METHOD FOR FORMING A THREE-COMPONENT NITRIDE FILM CONTAINING METAL AND SILICON
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|
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Patent #:
|
|
Issue Dt:
|
09/23/2003
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Application #:
|
09554444
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Filing Dt:
|
07/13/2000
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|
Title:
|
CHEMICAL VAPOR DEPOSITION METHOD USING A CATALYST ON A SUBSTRATE SURFACE
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|
|
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Patent #:
|
|
Issue Dt:
|
08/13/2002
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Application #:
|
09554535
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Filing Dt:
|
05/12/2000
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Title:
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GAS FEEDING SYSTEM FOR CHEMICAL VAPOR DEPOSITION REACTOR AND METHOD OF CONTROLLING THE SAME
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|
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Patent #:
|
|
Issue Dt:
|
04/30/2002
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Application #:
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09718837
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Filing Dt:
|
11/20/2000
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Title:
|
METHOD OF VAPORIZING LIQUID SOURCES AND APPARATUS THEREFOR
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|
|
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Patent #:
|
|
Issue Dt:
|
11/11/2003
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Application #:
|
09719103
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Filing Dt:
|
12/06/2000
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|
Title:
|
METHOD OF FORMING A THIN FILM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/13/2004
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Application #:
|
09738213
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Filing Dt:
|
12/15/2000
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Publication #:
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Pub Dt:
|
09/06/2001
| | | | |
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Title:
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METHOD OF FORMING COPPER INTERCONNECTIONS AND THIN FILMS USING CHEMICAL VAPOR DEPOSITION WITH CATALYST
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/01/2003
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Application #:
|
09763238
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Filing Dt:
|
02/14/2001
|
|
Title:
|
CHEMICAL DEPOSITION REACTOR AND METHOD OF FORMING A THIN FILM USING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/08/2003
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Application #:
|
10056487
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Filing Dt:
|
01/28/2002
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Title:
|
ULTRA-DENSE WAVELENGTH DIVISION MULITPLEXING/DEMULTIPLEXING DEVICES
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/28/2006
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Application #:
|
10297867
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Filing Dt:
|
07/15/2003
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|
Publication #:
|
|
Pub Dt:
|
01/15/2004
| | | | |
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Title:
|
THIN FILM FORMING METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/21/2006
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Application #:
|
10486311
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Filing Dt:
|
02/06/2004
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|
Publication #:
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|
Pub Dt:
|
11/25/2004
| | | | |
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Title:
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PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) EQUIPMENT AND METHOD OF FORMING A CONDUCTING THIN FILM USING THE SAME THEREOF
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10495156
|
Filing Dt:
|
10/14/2004
|
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
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Title:
|
Apparatus for depositing
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|
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10495157
|
Filing Dt:
|
10/08/2004
|
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
|
Title:
|
Method for forming thin film
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10600494
|
Filing Dt:
|
06/07/2004
|
|
Publication #:
|
|
Pub Dt:
|
11/18/2004
| | | | |
|
Title:
|
Catalyst comprising two catalytically-active metals
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11318786
|
Filing Dt:
|
12/27/2005
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|
Publication #:
|
|
Pub Dt:
|
06/29/2006
| | | | |
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Title:
|
Atomic layer deposition apparatus
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|
