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Patent #:
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Issue Dt:
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01/15/1985
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Application #:
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06381292
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Filing Dt:
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05/24/1982
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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08/05/1986
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Application #:
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06496460
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Filing Dt:
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05/20/1983
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Title:
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VACUUM PICKUP APPARATUS
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Patent #:
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Issue Dt:
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10/13/1987
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Application #:
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06611419
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Filing Dt:
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05/17/1984
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Title:
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OBJECT HANDLING APPARATUS
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Patent #:
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Issue Dt:
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06/23/1987
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Application #:
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06635384
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Filing Dt:
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07/30/1984
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Title:
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SEALED STANDARD INTERFACE APPARATUS
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Patent #:
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Issue Dt:
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07/28/1987
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Application #:
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06667550
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Filing Dt:
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11/02/1984
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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06/30/1987
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Application #:
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06769709
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Filing Dt:
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08/26/1985
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Title:
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LONG ARM MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS
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Patent #:
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Issue Dt:
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06/23/1987
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Application #:
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06769850
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Filing Dt:
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08/26/1985
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Title:
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SHORT ARM MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS
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Patent #:
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Issue Dt:
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08/23/1988
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Application #:
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06825618
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Filing Dt:
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02/03/1986
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Title:
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APPARATUS FOR ALIGNING CIRCULAR OBJECTS
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Patent #:
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Issue Dt:
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05/24/1988
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Application #:
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06839790
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Filing Dt:
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03/13/1986
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Title:
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APPARATUS FOR HANDLING SENSITIVE MATERIAL SUCH AS SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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02/16/1988
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Application #:
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06840380
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Filing Dt:
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05/01/1986
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Title:
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SEALABLE TRANSPORTABLE CONTAINER HAVING A PARTICLE FILTERING SYSTEM
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Patent #:
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Issue Dt:
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06/07/1988
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Application #:
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06863084
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Filing Dt:
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05/14/1986
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Title:
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TRANSPORT MECHANISM
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Patent #:
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Issue Dt:
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10/13/1987
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Application #:
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06882039
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Filing Dt:
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07/07/1986
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Title:
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TIMING SIGNAL GENERATOR
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Patent #:
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Issue Dt:
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02/07/1989
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Application #:
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07049393
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Filing Dt:
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04/20/1987
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Title:
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MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS
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Patent #:
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Issue Dt:
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11/14/1989
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Application #:
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07050951
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Filing Dt:
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05/15/1987
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Title:
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WAFER CENTRATION DEVICE
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Patent #:
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Issue Dt:
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01/23/1990
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Application #:
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07050952
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Filing Dt:
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05/15/1987
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Title:
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WAFER MONITORING DEVICE
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Patent #:
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Issue Dt:
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03/17/1992
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Application #:
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07054212
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Filing Dt:
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05/18/1987
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Title:
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INTELLIGENT WAFER CARRIER
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Patent #:
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Issue Dt:
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05/02/1989
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Application #:
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07061935
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Filing Dt:
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06/11/1987
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Title:
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METHOD AND APPARATUS FOR MONITORING THE LOCATION OF WAFER DISKS
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Patent #:
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Issue Dt:
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08/22/1989
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Application #:
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07111040
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Filing Dt:
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10/21/1987
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Title:
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APPARATUS FOR TRANSPORTING A HOLDER BETWEEN A PORT OPENING OF A STANDARDIZED MECHANICAL INTERFACE SYSTEM AND A LOADING AND UNLOADING STATION
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Patent #:
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Issue Dt:
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05/23/1989
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Application #:
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07196132
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Filing Dt:
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05/18/1988
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Title:
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BAR CODE REMOTE RECOGNITION SYSTEM FOR PROCESS CARRIERS OF WAFER DISKS
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Patent #:
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Issue Dt:
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01/16/1990
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Application #:
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07262216
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Filing Dt:
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10/21/1988
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Title:
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SURFACE ANALYSIS SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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01/09/1990
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Application #:
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07323207
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Filing Dt:
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03/13/1989
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Title:
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WAFER ALIGNMENT AND TRANSPORT MECHANISM
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Patent #:
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Issue Dt:
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12/19/1989
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Application #:
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07346915
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Filing Dt:
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05/03/1989
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Title:
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WAFER DISK LOCATION MONITORING SYSTEM AND TAGGED PROCESS CARRIERS FOR USE THEREWITH
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Patent #:
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Issue Dt:
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12/18/1990
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Application #:
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07427512
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Filing Dt:
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10/27/1989
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Title:
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VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
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Patent #:
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Issue Dt:
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04/07/1992
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Application #:
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07438479
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Filing Dt:
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11/21/1989
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Title:
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METHOD FOR TRANSPORTING SILICON WAFERS
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Patent #:
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Issue Dt:
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11/27/1990
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Application #:
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07458767
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Filing Dt:
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12/29/1989
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Title:
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PROCESSING SYSTEMS WITH INTELLIGENT ARTICLE TRACKING
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Patent #:
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Issue Dt:
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01/08/1991
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Application #:
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07471703
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Filing Dt:
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01/29/1990
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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01/22/1991
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Application #:
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07471708
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Filing Dt:
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01/29/1990
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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10/22/1991
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Application #:
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07481749
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Filing Dt:
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02/15/1990
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Title:
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PARTICLE-FREE STORAGE FOR ARTICLES
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Patent #:
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Issue Dt:
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05/26/1992
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Application #:
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07588169
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Filing Dt:
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09/26/1990
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Title:
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VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
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Patent #:
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Issue Dt:
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12/08/1992
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Application #:
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07607898
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Filing Dt:
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11/01/1990
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
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Patent #:
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Issue Dt:
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06/30/1992
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Application #:
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07638179
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Filing Dt:
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01/04/1991
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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08/16/1994
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Application #:
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07759538
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Filing Dt:
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09/13/1991
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Title:
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VERY LOW FREQUENCY TRACKING SYSTEM
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Patent #:
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Issue Dt:
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11/24/1992
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Application #:
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07797714
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Filing Dt:
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11/25/1991
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Title:
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INTELLIGENT SYSTEM FOR PROCESSING AND STORING ARTICLES
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Patent #:
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Issue Dt:
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05/31/1994
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Application #:
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07888477
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Filing Dt:
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05/22/1992
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Title:
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VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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07948148
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Filing Dt:
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09/21/1992
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08147372
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Filing Dt:
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11/05/1993
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Title:
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HUMAN GUIDED MOBILE LOADER STOCKER
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Patent #:
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Issue Dt:
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01/31/1995
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Application #:
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08155428
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Filing Dt:
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11/19/1993
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Title:
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DEVICES AND METHODS FOR READING IDENTIFICATION MARKS ON SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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11/03/1998
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Application #:
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08179678
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Filing Dt:
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01/11/1994
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Title:
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APPARATUS AND METHODS FOR VIEWING IDENTIFICATION MARKS ON SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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02/20/1996
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Application #:
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08234402
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Filing Dt:
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04/28/1994
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Title:
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SURFACE DEFECT INSPECTION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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08/20/1996
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Application #:
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08299900
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Filing Dt:
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09/01/1994
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
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Patent #:
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Issue Dt:
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12/24/1996
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Application #:
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08394698
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Filing Dt:
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02/27/1995
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Title:
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DIRECT LOADLOCK INTERFACE
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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08400039
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Filing Dt:
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03/07/1995
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Title:
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POD LOADER INTERFACE
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08498455
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Filing Dt:
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07/05/1995
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Title:
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SMIF PORT INTERFACE ADAPTOR
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08500219
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Filing Dt:
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07/10/1995
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Title:
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METHOD AND APPARATUS FOR VERTICAL TRANSFER OF A SEMICONDUCTOR WAFER CASSETTE
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08500595
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Filing Dt:
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07/11/1995
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Title:
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STAGE ASSEMBLY FOR A SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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10/07/1997
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Application #:
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08503677
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Filing Dt:
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07/18/1995
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Title:
|
DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08518517
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Filing Dt:
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08/23/1995
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Title:
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SEALABLE, TRANSPORTABLE CONTAINER ADAPTED FOR HORIZONTAL LOADING AND UNLOADING
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08563134
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Filing Dt:
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11/27/1995
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Title:
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ALIGNER FOR A SUBSTRATE CARRIER
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08584374
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Filing Dt:
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01/11/1996
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Title:
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METHOD FOR DRY CLEANING CLEAN ROOM CONTAINERS
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08645341
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Filing Dt:
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05/13/1996
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Title:
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HUMIDIFIER FOR CONTROL OF SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08680366
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Filing Dt:
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07/15/1996
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Title:
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TRANSPORT APPARATUS FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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08713396
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Filing Dt:
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09/13/1996
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Title:
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MOLECULAR CONTAMINATION CONTROL SYSTEM
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08730484
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Filing Dt:
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10/11/1996
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Title:
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ROTATED, ORTHOGONAL LOAD COMPATIBLE FRONT-OPENING INTERFACE
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Patent #:
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Issue Dt:
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07/04/2000
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Application #:
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08730643
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Filing Dt:
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10/11/1996
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Title:
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LOAD PORT OPENER
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08843245
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Filing Dt:
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04/14/1997
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Title:
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INTEGRATED INTRABAY BUFFER, DELIVERY, AND STOCKER SYSTEM
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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08891543
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Filing Dt:
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07/11/1997
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Title:
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SMIF POD STORAGE, DELIVERY AND RETRIEVAL SYSTEM
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Patent #:
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Issue Dt:
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12/15/1998
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Application #:
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08916021
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Filing Dt:
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08/21/1997
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Title:
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DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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08998115
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Filing Dt:
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12/24/1997
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Title:
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PORT DOOR REMOVAL AND WAFER HANDLING ROBOTIC SYSTEM
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09049330
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Filing Dt:
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03/27/1998
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Title:
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KINEMATIC COUPLING COMPATIBLE PASSIVE INTERFACE SEAL
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09049461
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Filing Dt:
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03/27/1998
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Title:
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EVACUATION-DRIVEN SMIF POD PURGE SYSTEM
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09050321
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Filing Dt:
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03/30/1998
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Title:
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PROGRAMMABLE SUBSTRATE SUPPORT FOR A SUBSTRATE POSITIONING SYSTEM
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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09083834
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Filing Dt:
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05/22/1998
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Title:
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METHOD AND APPARATUS FOR VERTICAL TRANSFER OF A SEMICONDUCTOR WAFER CASSETTE
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09103479
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Filing Dt:
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06/24/1998
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Title:
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INTEGRATED ROLLER TRANSPORT POD AND ASYNCHRONOUS CONVEYOR
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09114711
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Filing Dt:
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07/13/1998
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Title:
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POD DOOR ALIGNMENT DEVICE
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09115414
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Filing Dt:
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07/14/1998
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Title:
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POD DOOR TO PORT DOOR RETENTION SYSTEM
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09115526
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Filing Dt:
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07/13/1998
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Title:
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ERGONOMIC, VARIABLE SIZE, BOTTOM OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09127278
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Filing Dt:
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07/31/1998
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Title:
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FILTER CARTRIDGE ASSEMBLY
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09130254
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Filing Dt:
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08/06/1998
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Title:
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POD TO PORT DOOR RETENTION AND EVACUATION SYSTEM
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09145704
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Filing Dt:
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09/02/1998
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Title:
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TILT AND GO LOAD PORT INTERFACE ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09162334
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Filing Dt:
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09/28/1998
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Title:
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METHOD FOR IN-CASSETTE WAFER CENTER DETERMINATION
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09173710
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Filing Dt:
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10/15/1998
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Title:
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WAFER MAPPING SYSTEM
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09176476
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Filing Dt:
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10/21/1998
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Title:
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DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09204320
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Filing Dt:
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12/02/1998
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Title:
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PASSIVELY ACTIVATED VALVE FOR CARRIER PURGING
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09204421
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Filing Dt:
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12/02/1998
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Title:
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METHOD AND APPARATUS FOR AUTOMATING A MICROELECTRIC MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09212002
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Filing Dt:
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12/14/1998
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Title:
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DISTRIBUTED CONTROL SYSTEM ARCHITECTURE AND METHOD FOR A MATERIAL TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09247695
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Filing Dt:
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02/10/1999
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Title:
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RETICLE TRANSFER SYSTEM
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09313945
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Filing Dt:
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05/18/1999
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Title:
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CASSETTE BUFFERING WITHIN A MINIENVIRONMENT
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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09343110
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Filing Dt:
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06/29/1999
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Title:
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METHOD FOR SUPPLYING WAFERS TO AN IC MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09346166
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Filing Dt:
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07/01/1999
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Title:
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UNIVERSAL TOOL INTERFACE AND/OR WORKPIECE TRANSFER APPARATUS FOR SMIF AND OPEN POD APPLICATIONS
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09351986
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Filing Dt:
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07/12/1999
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Title:
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SMIF-COMPATIBLE OPEN CASSETTE ENCLOSURE
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09365457
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Filing Dt:
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08/02/1999
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Title:
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TRANSPORT SYSTEM WITH INTEGRATED TRANSPORT CARRIER AND DIRECTORS
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09452059
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Filing Dt:
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11/30/1999
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Title:
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WAFER ORIENTING AND READING MECHANISM
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09461151
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Filing Dt:
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12/14/1999
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Title:
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SYSTEM AND METHOD FOR CASCADE CONTROL OF TEMPERATURE AND HUMIDITY FOR SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09461498
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Filing Dt:
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12/14/1999
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Title:
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INTEGRATED INTRA-BAY TRANSFER, STORAGE, AND DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09467093
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Filing Dt:
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12/10/1999
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Title:
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INTEGRATED LOAD PORT-CONVEYOR TRANSFER SYSTEM
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09467103
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Filing Dt:
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12/10/1999
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Title:
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IN/OUT LOAD PORT TRANSFER MECHANISM
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09483625
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Filing Dt:
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01/14/2000
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Title:
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WORKPIECE HANDLING ROBOT
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Patent #:
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Issue Dt:
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09/27/2011
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Application #:
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09496009
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Filing Dt:
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02/01/2000
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Title:
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APPARATUS AND METHOD FOR WEB-BASED TOOL MANAGEMENT
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09507556
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Filing Dt:
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02/18/2000
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Title:
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SYSTEM FOR INSTALLATION, MAINTENANCE AND REMOVAL OF MINIENVIRONMENT COMPONENTS
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09547551
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Filing Dt:
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04/12/2000
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Title:
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System for parallel processing of workpieces
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09547829
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Filing Dt:
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04/12/2000
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Title:
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MODULAR SORTER
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09593245
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Filing Dt:
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06/13/2000
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Title:
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POD LOADER INTERFACE END EFFECTORS
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09641032
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Filing Dt:
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08/16/2000
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Title:
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SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09687770
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Filing Dt:
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10/14/2000
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Title:
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CLUTCHING FEATURE FOR ADJUSTING DEVICE
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09723629
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Filing Dt:
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11/28/2000
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Title:
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FIMS INTERFACE WITHOUT ALIGNMENT PINS
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09729463
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Filing Dt:
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12/04/2000
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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SELF TEACHING ROBOT
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09729737
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Filing Dt:
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12/04/2000
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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WAFER TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
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02/01/2005
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Application #:
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09760147
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Filing Dt:
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01/12/2001
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Publication #:
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Pub Dt:
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07/18/2002
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Title:
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WORKPIECE SORTER OPERATING WITH MODULAR BARE WORKPIECE STOCKERS AND/OR CLOSED CONTAINER STOCKERS
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09766227
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Filing Dt:
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01/18/2001
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Title:
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METHOD AND SYSTEM FOR IMPROVED PER-PIXEL SHADING IN A COMPUTER GRAPHICS SYSTEM
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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09776227
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Filing Dt:
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02/02/2001
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Publication #:
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Pub Dt:
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08/08/2002
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Title:
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SYSTEM FOR SAFEGUARDING INTEGRATED INTRABAY POD DELIVERY AND STORAGE SYSTEM
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