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Patent #:
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Issue Dt:
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10/10/1995
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Application #:
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08148906
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Filing Dt:
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12/20/1993
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Title:
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CONDITIONER FOR A POLISHING PAD AND METHOD THEREFOR
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Patent #:
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Issue Dt:
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02/25/1997
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Application #:
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08421706
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Filing Dt:
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04/13/1995
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Title:
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FLATTENING METHOD AND FLATTENING APPARATUS OF A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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07/01/1997
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Application #:
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08504686
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Filing Dt:
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07/20/1995
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Title:
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PNEUMATIC POLISHING HEAD FOR CMP APPARATUS
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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08596980
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Filing Dt:
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02/05/1996
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Title:
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SYSTEM FOR IMPROVING THE TOTAL THICKNESS VARIATION OF A WAFER
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08681794
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Filing Dt:
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07/29/1996
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Title:
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SLURRY RECYCLING IN CMP APPARATUS
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08683571
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Filing Dt:
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07/15/1996
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Title:
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APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08720744
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Filing Dt:
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10/02/1996
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Title:
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METHODS AND APPARATUS FOR MEASURING AND DISPENSING PROCESSING SOLUTIONS TO A CMP MACHINE
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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08792936
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Filing Dt:
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01/24/1997
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Title:
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WAFER POLISHING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08798803
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Filing Dt:
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02/12/1997
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Title:
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METHODS AND APPARATUS FOR DETECTING REMOVAL OF THIN FILM LAYERS DURING PLANARIZATION
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Patent #:
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Issue Dt:
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12/22/1998
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Application #:
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08800941
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Filing Dt:
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02/13/1997
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Title:
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SEMICONDUCTOR WAFER POLISHING APPARATUS WITH A FLEXIBLE CARRIER PLATE
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08829056
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Filing Dt:
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03/31/1997
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Title:
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APPARATUS FOR CLEANING WAFERS AND DISCS
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08850057
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Filing Dt:
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05/02/1997
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Title:
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BRUSH FOR SCRUBBING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/23/1999
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Application #:
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08854862
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Filing Dt:
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05/12/1997
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Title:
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APPARATUS FOR CONDITIONING POLISHING PADS
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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08883404
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Filing Dt:
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06/26/1997
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Title:
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METHODS AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION USING A MICROREPLICATED SURFACE
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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08926700
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Filing Dt:
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09/10/1997
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Title:
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COMBINED CMP AND WAFER CLEANING APPARATUS AND ASSOCIATED METHODS
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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08984243
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Filing Dt:
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12/03/1997
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Title:
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METHOD AND APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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09008148
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Filing Dt:
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01/16/1998
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Title:
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METHODS AND APPARATUS FOR THE CHEMICAL MECHANICAL PLANARIZATION OF ELECTRONIC DEVICES
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09028791
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Filing Dt:
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02/24/1998
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Title:
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APPARATUS AND METHOD FOR THE FACE-UP SURFACE TREATMENT OF WAFERS
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09093467
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Filing Dt:
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06/08/1998
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Title:
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METHOD AND APPARATUS FOR ENDPOINT DETECTION FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09096066
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Filing Dt:
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06/11/1998
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Title:
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DISTRIBUTED CONTROL SYSTEM FOR A SEMICONDUCTOR WAFER PROCESSING MACHINE
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09096131
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Filing Dt:
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06/11/1998
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Title:
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METHOD FOR SIMULTANEOUS NON-CONTACT ELECTROCHEMICAL PLATING AND PLANARIZING OF SEMICONDUCTOR WAFERS USING A BIPIOLAR ELECTRODE ASSEMBLY
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09096220
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Filing Dt:
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06/11/1998
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Title:
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METHOD AND APPARATUS FOR NON-CONTACT METAL PLATING OF SEMICONDUCTOR WAFERS USING A BIPOLAR ELECTRODE ASSEMBLY
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09096309
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Filing Dt:
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06/11/1998
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Title:
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METHOD AND APPARATUS FOR PLANARIZATION OF METALLIZED SEMICONDUTOR WAFERS USING A BIPOLAR ELECTRODE ASSEMBLY
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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09121995
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Filing Dt:
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07/24/1998
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Title:
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SEMICONDUCTOR WAFER SURFACE FLATTENING APPARATUS
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09153993
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Filing Dt:
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09/17/1998
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Title:
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OSCILLATING ORBITAL POLISHER AND METHOD
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09169333
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Filing Dt:
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10/09/1998
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Title:
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SEMICONDUCTOR WAFER POLISHING APPARATUS WITH A VARIABLE POLISHING FORCE WAFER CARRIER HEAD
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09212929
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Filing Dt:
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12/16/1998
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Title:
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MULTI-STEP CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09252007
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Filing Dt:
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02/16/1999
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Title:
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WAFER SENSOR UTILIZING HYDRODYNAMIC PRESSURE DIFFERENTIAL
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09253438
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Filing Dt:
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02/19/1999
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Title:
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ARRANGMENTS FOR WAFER POLISHING
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09261868
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Filing Dt:
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03/03/1999
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Title:
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PAD CONDITIONING FOR COPPER-BASED SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09264066
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Filing Dt:
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03/08/1999
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Title:
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DUAL PURPOSE HANDOFF STATION FOR WORKPIECE POLISHING MACHINE
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09271729
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Filing Dt:
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03/18/1999
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Title:
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METHOD AND APPARATUS FOR ENDPOINT DETECTION FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09280767
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Filing Dt:
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03/29/1999
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Title:
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TWO-STEP CHEMICAL-MECHANICAL PLANARIZATION FOR DAMASCENE STRUCTURES ON SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09294406
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Filing Dt:
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04/19/1999
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Title:
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SACRIFICIAL DEPOSIT TO IMPROVE DAMASCENE PATTERN PLANARIZATION IN SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09302970
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Filing Dt:
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04/30/1999
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Title:
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METHODS AND APPARATUS FOR IMPROVED POLISHING OF WORKPIECES
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09303463
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Filing Dt:
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04/30/1999
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Title:
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METHOD AND APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09303483
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Filing Dt:
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04/30/1999
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Title:
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METHOD FOR MAKING A POLISHING APPARATUS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09356787
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Filing Dt:
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07/20/1999
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Title:
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INDEX TABLE AND DRIVE MECHANISM FOR A CHEMICAL MECHANICAL PLANARIZATION MACHINE
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|
|
|
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09361672
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Filing Dt:
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07/26/1999
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Title:
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METHODS FOR SPIN DRYING A WORKPIECE
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|
|
|
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09372270
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Filing Dt:
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08/11/1999
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Title:
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METHOD AND APPARATUS FOR IN-SITU MEASUREMENT OF WORKPIECE DISPLACEMENT DURING CHEMICAL MECHANICAL POLISHING
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|
|
|
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09389778
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Filing Dt:
|
09/03/1999
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Title:
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VACUUM SYSTEM COUPLED TO A WAFER CHUCKFOR HOLDING WET WAFERS
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|
|
|
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Patent #:
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|
Issue Dt:
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06/10/2003
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Application #:
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09391113
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Filing Dt:
|
09/07/1999
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Title:
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CLEAN ROOM AND METHOD
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|
|
|
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Patent #:
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|
Issue Dt:
|
03/20/2001
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Application #:
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09434650
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Filing Dt:
|
11/05/1999
|
|
Title:
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CHEMICAL MECHANICAL POLISHING TOOL COMPONENTS WITH IMPROVED CORROSION RESISTANCE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/2002
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Application #:
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09441436
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Filing Dt:
|
11/16/1999
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|
Title:
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HYDROPHOBIC OPTICAL ENDPOINT LIGHT PIPES FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
|
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Issue Dt:
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01/07/2003
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Application #:
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09492020
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Filing Dt:
|
01/26/2000
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Title:
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METHOD AND APPARATUS FOR CLEANING WORKPIECES WITH UNIFORM RELATIVE VELOCITY
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09504565
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Filing Dt:
|
02/15/2000
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|
Title:
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System and method for detecting cmp endpoint via direct chemical monitoring of reactions
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Patent #:
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Issue Dt:
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02/08/2005
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Application #:
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09517714
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Filing Dt:
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03/02/2000
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Title:
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ROBOTIC METHOD OF TRANSFERRING WORKPIECES TO AND FROM WORKSTATIONS
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Patent #:
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Issue Dt:
|
05/21/2002
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Application #:
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09517719
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Filing Dt:
|
03/02/2000
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Title:
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CLEANING STATION INTEGRAL WITH POLISHING MACHINE FOR SEMICONDUCTOR WAFERS
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|
|
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Patent #:
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|
Issue Dt:
|
05/08/2001
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Application #:
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09518157
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Filing Dt:
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03/02/2000
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Title:
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Robot assisted method of polishing, cleaning and drying workpieces
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09518158
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Filing Dt:
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03/02/2000
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Title:
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LOAD AND UNLOAD STATION FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09525315
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Filing Dt:
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03/13/2000
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Title:
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MAPPING SYSTEM FOR SEMICONDUCTOR WAFER CASSETTES
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09536580
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Filing Dt:
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03/28/2000
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Title:
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Ultrasonic methods and apparatus for the in-situ detection of workpiece loss
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09540476
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Filing Dt:
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03/31/2000
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Title:
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Workpiece carrier with adjustable pressure zones and barriers
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09541414
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Filing Dt:
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03/31/2000
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Title:
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Carrier having pistons for distributing a pressing force on the back surface of a workpiece
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09541753
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Filing Dt:
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03/31/2000
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Title:
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CARRIER INCLUDING A MULTI-VOLUME DIAPHRAGM FOR POLISHING A SEMICONDUCTOR WAFER AND A METHOD THEREFOR
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09547579
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Filing Dt:
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04/12/2000
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Title:
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METHOD AND APPARATUS FOR IN-SITU ENDPOINT DETECTION USING ELECTRICAL SENSORS
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09559905
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Filing Dt:
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04/26/2000
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|
Title:
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Method and apparatus for improved stability chemical mechanical polishing
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|
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09573621
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Filing Dt:
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05/17/2000
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|
Title:
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Combined cmp and wafer cleaning apparatus and associated methods
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Patent #:
|
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Issue Dt:
|
07/16/2002
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Application #:
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09577448
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Filing Dt:
|
05/24/2000
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Title:
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APPARATUS AND PROCESS FOR CLEANING A WORK PIECE
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|
|
|
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Patent #:
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Issue Dt:
|
04/02/2002
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Application #:
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09586207
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Filing Dt:
|
06/02/2000
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|
Title:
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Apparatus and method for spinning a work piece
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|
|
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Patent #:
|
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Issue Dt:
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10/15/2002
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Application #:
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09586934
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Filing Dt:
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06/02/2000
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|
Title:
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METHODS AND APPARATUS FOR THE IN-SITU MEASUREMENT OF CMP PROCESS ENDPOINT
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|
|
|
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Patent #:
|
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Issue Dt:
|
02/03/2004
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Application #:
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09587593
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Filing Dt:
|
06/05/2000
|
|
Title:
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POLISHING PAD WINDOW FOR A CHEMICAL MECHANICAL POLISHING TOOL
|
|
|
|
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Patent #:
|
|
Issue Dt:
|
02/26/2002
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Application #:
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09642954
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Filing Dt:
|
08/21/2000
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|
Title:
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Polishing pad conditioning device with cutting elements
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|
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Patent #:
|
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Issue Dt:
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12/31/2002
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Application #:
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09664125
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Filing Dt:
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09/18/2000
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Title:
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OSCILLATING ORBITAL POLISHER AND METHOD
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09679473
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Filing Dt:
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10/04/2000
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Title:
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METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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09690521
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Filing Dt:
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10/17/2000
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Title:
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MULTIPROBE DETECTION SYSTEM FOR CHEMICAL-MECHANICAL PLANARIZATION TOOL
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09703210
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Filing Dt:
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10/31/2000
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Title:
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MODIFICATION TO FILL LAYERS FOR INLAYING SEMICONDUCTOR PATTERNS
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09705307
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Filing Dt:
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11/03/2000
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Title:
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ORBITING INDEXABLE BELT POLISHING STATION FOR CHEMICAL MECHANICAL POLISHING
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|
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Patent #:
|
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Issue Dt:
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12/24/2002
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Application #:
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09712460
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Filing Dt:
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11/14/2000
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Title:
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METHODS AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION USING A MICROREPLACED SURFACE
|
|
|
|
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Patent #:
|
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Issue Dt:
|
04/01/2003
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Application #:
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09716784
|
Filing Dt:
|
11/20/2000
|
|
Title:
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CARRIER HEAD WITH REDUCED MOMENT WEAR RING
|
|
|
|
|
Patent #:
|
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Issue Dt:
|
09/10/2002
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Application #:
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09716873
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Filing Dt:
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11/20/2000
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Title:
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CARRIERS WITH CONCENTRIC BALLOONS SUPPORTING A DIAPHRAGM
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09724398
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Filing Dt:
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11/28/2000
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Title:
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METHOD TO MATHEMATICALLY CHARACTERIZE A MULTIZONE CARRIER
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|
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09724417
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Filing Dt:
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11/28/2000
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Title:
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METHOD TO DETERMINE OPTIMUM GEOMETRY OF A MULTIZONE CARRIER
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Patent #:
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Issue Dt:
|
01/07/2003
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Application #:
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09741461
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Filing Dt:
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12/19/2000
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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PROCESS FOR MONITORING A PROCESS, PLANARIZING A SURFACE, AND FOR QUANTIFYING THE RESULTS OF A PLANARIZATION PROCESS
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Patent #:
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Issue Dt:
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01/21/2003
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Application #:
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09761336
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Filing Dt:
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01/16/2001
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Publication #:
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Pub Dt:
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07/18/2002
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Title:
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MULTI-ZONE PRESSURE CONTROL CARRIER
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09764245
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Filing Dt:
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01/17/2001
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Publication #:
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Pub Dt:
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06/28/2001
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Title:
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DUAL PURPOSE HANDOFF STATION FOR WORKPIECE POLISHING MACHINE
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|
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09772722
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Filing Dt:
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01/30/2001
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Title:
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METHOD FOR SELECTIVE REMOVAL OF COPPER
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|
|
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09781593
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Filing Dt:
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02/12/2001
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Publication #:
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Pub Dt:
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08/15/2002
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Title:
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METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
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|
|
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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09812655
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Filing Dt:
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03/19/2001
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Publication #:
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Pub Dt:
|
09/19/2002
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Title:
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LOW AMPLITUDE, HIGH SPEED POLISHER AND METHOD
|
|
|
|
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09817554
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Filing Dt:
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03/26/2001
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Title:
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RIGID POLISHING PAD CONDITIONER FOR CHEMICAL MECHANICAL POLISHING TOOL
|
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|
|
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Patent #:
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Issue Dt:
|
02/01/2005
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Application #:
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09826674
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Filing Dt:
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04/05/2001
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Publication #:
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Pub Dt:
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10/10/2002
| | | | |
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Title:
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APPARATUS AND PROCESS FOR POLISHING A WORKPIECE
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Patent #:
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Issue Dt:
|
04/15/2003
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Application #:
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09829493
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Filing Dt:
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04/09/2001
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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METHOD AND APPARATUS FOR OPTICAL ENDPOINT CALIBRATION IN CMP
|
|
|
|
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Patent #:
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Issue Dt:
|
06/03/2003
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Application #:
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09832657
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Filing Dt:
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04/11/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD AND APPARATUS FOR ELECTROCHEMICALLY DEPOSITING A MATERIAL ONTO A WORKPIECE SURFACE
|
|
|
|
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Patent #:
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Issue Dt:
|
09/10/2002
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Application #:
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09836789
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Filing Dt:
|
04/17/2001
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Title:
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INLINE METROLOGY DEVICE
|
|
|
|
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Patent #:
|
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Issue Dt:
|
12/10/2002
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Application #:
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09838980
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Filing Dt:
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04/19/2001
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
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Title:
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METHOD AND APPARATUS FOR USING OPTICAL REFLECTION DATA TO OBTAIN A CONTINUOUS PREDICTIVE SIGNAL DURING CMP
|
|
|
|
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Patent #:
|
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Issue Dt:
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01/13/2004
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Application #:
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09839631
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Filing Dt:
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04/20/2001
|
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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LEARNING METHOD AND APPARATUS FOR PREDICTIVE DETERMINATION OF ENDPOINT DURING CHEMICAL MECHANICAL PLANARIZATION USING SPARSE SAMPLING
|
|
|
|
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09846965
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Filing Dt:
|
05/01/2001
|
|
Publication #:
|
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Pub Dt:
|
11/07/2002
| | | | |
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Title:
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METHOD FOR CONTROLLING A PROCESS IN A MULTI-ZONAL APPARATUS
|
|
|
|
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Patent #:
|
|
Issue Dt:
|
10/08/2002
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Application #:
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09851866
|
Filing Dt:
|
05/09/2001
|
|
Title:
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METHOD OF REMOVING DEBRIS FROM CLEANING PADS IN WORK PIECE CLEANING EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2003
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Application #:
|
09859656
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Filing Dt:
|
05/16/2001
|
|
Publication #:
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Pub Dt:
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11/21/2002
| | | | |
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Title:
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DYNAMIC SLURRY DISTRIBUTION CONTROL FOR CMP
|
|
|
|
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Patent #:
|
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Issue Dt:
|
06/03/2003
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Application #:
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09863582
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Filing Dt:
|
05/16/2001
|
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Publication #:
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Pub Dt:
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11/21/2002
| | | | |
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Title:
|
MULTIZONE SLURRY DELIVERY FOR CHEMICAL MECHANICAL POLISHING TOOL
|
|
|
|
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Patent #:
|
|
Issue Dt:
|
11/04/2003
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Application #:
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09893131
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Filing Dt:
|
06/27/2001
|
|
Publication #:
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Pub Dt:
|
01/02/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR DISTRIBUTING FLUID TO A POLISHING SURFACE DURING CHEMICAL MECHANICAL POLISHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/29/2003
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Application #:
|
09923172
|
Filing Dt:
|
08/06/2001
|
|
Publication #:
|
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Pub Dt:
|
02/06/2003
| | | | |
|
Title:
|
APPARATUS FOR DISTRIBUTING A FLUID THROUGH A POLISHING PAD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
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Application #:
|
09924067
|
Filing Dt:
|
08/07/2001
|
|
Publication #:
|
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Pub Dt:
|
03/28/2002
| | | | |
|
Title:
|
WORKPIECE CARRIER RETAINING ELEMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2003
|
Application #:
|
09941109
|
Filing Dt:
|
08/28/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR OPTICAL ENDPOINT DETECTION DURING CHEMICAL MECHANICAL POLISHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2003
|
Application #:
|
09941110
|
Filing Dt:
|
08/28/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR SENSING A WAFER IN A CARRIER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2004
|
Application #:
|
09943699
|
Filing Dt:
|
08/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
LAMINATED WEAR RING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2003
|
Application #:
|
09948836
|
Filing Dt:
|
09/07/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/06/2002
| | | | |
|
Title:
|
WORK PIECE WAND AND METHOD FOR PROCESSING WORK PIECES USING A WORK PIECE HANDLING WAND
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
09970185
|
Filing Dt:
|
10/03/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/25/2002
| | | | |
|
Title:
|
MULTIZONE CARRIER WITH PROCESS MONITORING SYSTEM FOR CHEMICAL-MECHANICAL PLANARIZATION TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
|
Application #:
|
09971332
|
Filing Dt:
|
10/04/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/10/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR CLEANING WORKPIECES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
09975450
|
Filing Dt:
|
10/11/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
|
Title:
|
WORKPIECE CARRIER WITH ADJUSTABLE PRESSURE ZONES AND BARRIERS
|
|
