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Patent #:
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Issue Dt:
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04/07/1992
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Application #:
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07315732
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Filing Dt:
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02/24/1989
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Title:
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LOCALIZED VACUUM APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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12/11/1990
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Application #:
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07474348
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Filing Dt:
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02/02/1990
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Title:
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PARTICLE BEAM SHIELDING
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Patent #:
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Issue Dt:
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04/21/1992
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Application #:
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07491113
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Filing Dt:
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03/09/1990
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Title:
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LINEAR AND ROTARY POSITIONING DEVICE
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Patent #:
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Issue Dt:
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01/28/1992
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Application #:
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07564221
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Filing Dt:
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08/07/1990
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Title:
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CORRECTION SYSTEM FOR A CHARGED-PARTICLE BEAM APPARATUS
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Patent #:
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Issue Dt:
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03/24/1992
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Application #:
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07611389
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Filing Dt:
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11/05/1990
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Title:
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HIGH SPEED WAFER HANDLER
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Patent #:
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Issue Dt:
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07/23/1991
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Application #:
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07622178
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Filing Dt:
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12/03/1990
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Title:
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ION SOURCE METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/23/1993
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Application #:
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07685844
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Filing Dt:
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04/15/1991
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Title:
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METHOD OF SEMICONDUCTOR DEVICE MANUFACTURE
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Patent #:
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Issue Dt:
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10/13/1992
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Application #:
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07686043
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Filing Dt:
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04/16/1991
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Title:
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ION BEAM BLANKING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07731676
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Filing Dt:
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07/17/1991
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Title:
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METHOD OF DIRECTLY DERIVING AMPLITUDE AND PHASE INFORMATION OF AN OBJECT FROM IMAGES PRODUCED BY A HIGH-RESOLUTION ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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12/07/1993
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Application #:
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07741026
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Filing Dt:
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08/06/1991
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Title:
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MONOPOLE MAGNETIC LENS FIELD
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Patent #:
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Issue Dt:
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06/30/1992
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Application #:
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07741030
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Filing Dt:
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08/06/1991
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Title:
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ENERGY FILTER FOR CHARGED PARTICLE BEAM APPARATUS
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Patent #:
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Issue Dt:
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08/10/1993
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Application #:
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07741282
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Filing Dt:
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08/07/1991
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Title:
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CHARGED PARTICLE BEAM DEVICE
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Patent #:
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Issue Dt:
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01/05/1993
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Application #:
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07805232
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Filing Dt:
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12/11/1991
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Title:
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HIGH SPEED WAFER HANDLING METHOD
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Patent #:
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Issue Dt:
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06/22/1993
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Application #:
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07837517
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Filing Dt:
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02/18/1992
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Title:
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CHARGED PARTICLE BEAM DEVICE
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Patent #:
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Issue Dt:
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08/09/1994
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Application #:
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07963647
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Filing Dt:
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10/20/1992
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Title:
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ELECTRON BEAM APPARATUS
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07982242
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Filing Dt:
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11/25/1992
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Title:
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PRECISION ELECTROSTATIC LENS SYSTEM AND METHOD OF MANUFACTURE
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Patent #:
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Issue Dt:
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04/05/1994
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Application #:
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08015694
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Filing Dt:
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02/09/1993
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Title:
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METHOD OF SELECTING A SPATIAL ENERGY SPREAD WITHIN AN ELECTRON BEAM, AND AN ELECTRON BEAM APPARATUS SUITABLE FOR CARRYING OUT SUCH A METHOD
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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08021481
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Filing Dt:
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02/22/1993
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Title:
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SECONDARY ION MASS SPECTROMETRY SYSTEM
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Patent #:
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Issue Dt:
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11/08/1994
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Application #:
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08100545
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Filing Dt:
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07/30/1993
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Title:
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ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08123292
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Filing Dt:
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09/17/1993
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Title:
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GAS INJECTION SYSTEM
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Patent #:
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Issue Dt:
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07/11/1995
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Application #:
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08148082
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Filing Dt:
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11/04/1993
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Title:
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METHOD FOR IMAGE RECONSTRUCTION IN A HIGH-RESOLUTION ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE SUITABLE FOR USE OF SUCH A METHOD
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Patent #:
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Issue Dt:
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09/05/1995
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Application #:
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08246534
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Filing Dt:
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05/20/1994
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Title:
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ENERGY FILTER WITH CORRECTION OF A SECOND-ORDER CHROMATIC ABERRATION
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Patent #:
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Issue Dt:
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05/02/1995
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Application #:
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08253548
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Filing Dt:
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06/03/1994
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Title:
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ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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11/14/1995
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Application #:
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08287103
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Filing Dt:
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08/08/1994
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Title:
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DUAL ELECTRON ANALYZER
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Patent #:
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Issue Dt:
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11/14/1995
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Application #:
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08301444
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Filing Dt:
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09/06/1994
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Title:
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ADDITIVE COMPOSITION OF DEFOCUSING IMAGES IN AN ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08328228
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Filing Dt:
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10/25/1994
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Title:
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METHOD OF MAKING SPECIMENS FOR AN ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08329192
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Filing Dt:
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10/26/1994
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Title:
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IMAGE-BASED THREE-AXIS POSITIONER FOR LASER DIRECT WRITE MICROCHEMICAL REACTION
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Patent #:
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Issue Dt:
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04/23/1996
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Application #:
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08404706
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Filing Dt:
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03/15/1995
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Title:
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PARTICLE-OPTICAL INSTRUMENT COMPRISING A DEFLECTION UNIT FOR SECONDARY ELECTRONS
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08419493
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Filing Dt:
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04/10/1995
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Title:
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PARTICLE-OPTICAL APPARATUS COMPRISING A DETECTOR FOR SECONDARY ELECTRONS
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Patent #:
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Issue Dt:
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07/30/1996
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Application #:
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08498740
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Filing Dt:
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07/06/1995
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Title:
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IMAGE-TO-IMAGE REGISTRATION FOCUSED ION BEAM SYSTEM
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Patent #:
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Issue Dt:
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12/24/1996
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Application #:
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08538512
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Filing Dt:
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10/03/1995
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Title:
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PARTICLE-OPTICAL APPARATUS COMPRISING AN ELECTRON SOURCE WITH A NEEDLE AND A MEMBRANE-LIKE EXTRACTION ELECTRODE
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08617655
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Filing Dt:
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03/15/1996
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Title:
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METHOD FOR PARTICLE WAVE RECONSTRUCTION IN A PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08635063
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Filing Dt:
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04/19/1996
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Title:
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THIN FILM MAGNETIC RECORDING HEADS AND SYSTEMS AND METHODS FOR MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
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12/22/1998
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Application #:
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08667966
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Filing Dt:
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06/19/1996
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Title:
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GAS DELIVERY SYSTEMS FOR PARTICLE BEAM PROCESSING
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08691147
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Filing Dt:
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08/01/1996
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Title:
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LASER-INDUCED ETCHING OF MULTILAYER
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08693616
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Filing Dt:
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08/07/1996
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Title:
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FIELD EMISSION ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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08695207
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Filing Dt:
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08/07/1996
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Title:
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HIGH TEMPERATURE SPECIMEN STAGE AND DETECTOR FOR AN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08723652
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Filing Dt:
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10/03/1996
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Title:
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METHOD OF RECONSTRUCTING AN IMAGE IN A PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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08810837
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Filing Dt:
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03/04/1997
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Title:
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THIN-FILM MAGNETIC RECORDING HEAD MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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03/28/2000
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Application #:
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08834356
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04/16/1997
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Title:
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PATTERN FILM REPAIR USING A FOCUSED PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
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11/17/1998
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08849205
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06/02/1997
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Title:
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PARTICLE-OPTICAL APPARATUS COMPRISING A FIXED DIAPHRAGM FOR THE MONO- CHROMATOR FILTER
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10/27/1998
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08853229
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04/28/1997
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Title:
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CHARGED PARTICLE DEPOSITION OF ELECTRICALLY INSULATING FILMS
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11/17/1998
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08861345
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05/21/1997
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Title:
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CORRECTION DEVICE FOR THE CORRECTION OF LENS ABERRATIONS IN PARTICLE -OPTICAL APPARATUS
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11/16/1999
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08932981
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09/18/1997
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Title:
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CORRECTION DEVICE FOR CORRECTING CHROMATIC ABERRATION IN PARTICLE-OPTICAL APPARATUS
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10/12/1999
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08982880
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12/02/1997
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METHOD OF OPERATING A PATRICLE-OPTICAL APPARATUS
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11/16/1999
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08990870
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12/15/1997
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Title:
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PARTICLE-OPTICAL APPARATUS INCLUDING A LOW-TEMPERATURE SPECIMEN HOLDER
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08/31/1999
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09015362
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01/29/1998
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Title:
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GASEOUS BACKSCATTERED ELECTRON DETECTOR FOR AN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
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03/21/2000
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09022065
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02/11/1998
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Title:
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FOCUSED PARTICLE BEAM SYSTEMS AND METHODS USING A TILT COLUMN
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12/25/2001
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09070559
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04/30/1998
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Title:
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THIN-FILM MAGNETIC RECORDING HEAD MANUFACTURE USING SELECTIVE IMAGING
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09/05/2000
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09129451
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08/04/1998
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WORKPIECE VIBRATION DAMPER
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07/31/2001
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09169566
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10/09/1998
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02/06/2001
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09195887
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11/19/1998
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Title:
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ELECTROSTATIC DEVICE FOR CORRECTING CHROMATIC ABERRATION IN A PARTICLE-OPTICAL APPARATUS
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02/06/2001
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09205441
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12/04/1998
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ENVIRONMENTAL SEM WITH A MULTIPLE FIELDS FOR IMPROVED SECONDARY ELECTRON DETECTION
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04/02/2002
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12/03/1998
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ENVIRONMENTAL SEM WITH A MAGNETIC FIELD FOR IMPROVED SECONDARY ELECTRON DIRECTION
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02/20/2001
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12/10/1998
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CORRECTION DEVICE FOR CORRECTING THE SPHERICAL ABERRATION IN PARTICLE-OPTICAL APPARATUS
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04/17/2001
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12/18/1998
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06/12/2001
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09217220
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12/21/1998
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CORRECTION DEVICE FOR CORRECTING CHROMATIC ABERRATION IN PARTICLE-OPTICAL APPARATUS
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04/03/2001
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09248650
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02/11/1999
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METHOD FOR DEVICE EDITING
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06/04/2002
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07/09/1999
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MEASUREMENT OF FILM THICKNESS BY INELASTIC ELECTRON SCATTERING
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07/02/2002
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07/09/1999
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12/24/2002
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09359534
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07/22/1999
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FOCUSED PARTICLE BEAM SYSTEMS AND METHODS USING A TILT COLUMN
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12/11/2001
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08/09/1999
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CORRECTION DEVICE FOR CORRECTING THE LENS DEFECTS IN PARTICLE-OPTICAL APPARATUS
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03/12/2002
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09370753
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08/09/1999
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04/16/2002
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10/12/1999
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METHOD AND APPARATUS FOR A COAXIAL OPTICAL MICROSCOPE WITH FOCUSED ION BEAM
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09/24/2002
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09464008
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12/15/1999
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PARTICLE-OPTICAL APPARATUS INVOLVING DETECTION OF AUGER ELECTRONS.
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06/12/2001
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09465494
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12/16/1999
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INTERPOLATED HEIGHT DETERMINATION IN AN ATOMIC FORCE MICROSCOPE
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04/23/2002
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09473537
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12/28/1999
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SEM FOR TRANSMISSION OPERATION WITH A LOCATION-SENSTIVE DETECTOR
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04/27/2004
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09513826
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02/25/2000
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SYSTEM FOR IMAGING A CROSS-SECTION OF A SUBSTRATE
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11/27/2001
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09522561
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03/10/2000
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Title:
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Method and apparatus for milling copper interconnects in a charged particle beam system
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05/14/2002
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09528093
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03/17/2000
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CORRUGATED STYLE ANODE ELEMENT FOR ION PUMPS
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02/17/2004
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09596217
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06/19/2000
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PARTICLE-OPTICAL APPARATUS INCLUDING A PARTICLE SOURCE THAT CAN BE SWITCHED BETWEEN HIGH BRIGHTNESS AND LARGE BEAM CURRENT
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01/20/2004
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09639451
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Filing Dt:
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08/15/2000
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Title:
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SCHOTTKY EMITTER HAVING EXTENDED LIFE
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09657428
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Filing Dt:
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09/08/2000
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Title:
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CARBON NANOTUBE PROBE TIP GROWN ON A SMALL PROBE
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09660654
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Filing Dt:
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09/13/2000
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Title:
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WEAR COATING APPLIED TO AN ATOMIC FORCE PROBE TIP
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09687261
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Filing Dt:
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10/11/2000
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Title:
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ELECTRON ANALYZER HAVING AN INTEGRATED LOW PASS FILTER
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09689059
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Filing Dt:
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10/12/2000
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Title:
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PARTICLE OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09745940
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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08/30/2001
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Title:
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MULTI-BEAM LITHOGRAPHY APPARATUS WITH MUTUALLY DIFFERENT BEAM LIMITING APERTURES
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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09765806
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Filing Dt:
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01/19/2001
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Publication #:
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Pub Dt:
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11/29/2001
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Title:
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SHAPED AND LOW DENSITY FOCUSED ION BEAMS
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09767570
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Filing Dt:
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01/23/2001
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Publication #:
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Pub Dt:
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08/09/2001
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Title:
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OBJECT CARRIER FOR A PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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09781125
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Filing Dt:
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02/08/2001
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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MULTI-COLUMN FIB FOR NANOFABRICATION APPLICATIONS
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09792990
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Filing Dt:
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02/26/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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STEP FUNCTION DETERMINATION OF AUGER PEAK INTENSITY
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09802342
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Filing Dt:
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03/09/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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METHOD AND APPARATUS FOR REPAIRING LITHOGRAPHY MASKS USING A CHARGED PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09818988
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Filing Dt:
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03/27/2001
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Publication #:
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Pub Dt:
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12/20/2001
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Title:
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APPARATUS AND METHOD FOR REDUCING DIFFERENTIAL SPUTTER RATES
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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09840558
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Filing Dt:
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04/23/2001
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Publication #:
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Pub Dt:
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02/28/2002
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Title:
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COLLECTION OF SECONDARY ELECTRONS THROUGH THE OBJECTIVE LENS OF A SCANNING ELECTRON MICROSCOPE
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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09859295
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Filing Dt:
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05/16/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Title:
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THROUGH-THE-LENS NEUTRALIZATION FOR CHARGED PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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09960224
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Filing Dt:
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09/20/2001
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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REAL TIME MONITORING FOR SIMULTANEOUS IMAGING AND EXPOSURE IN CHARGED PARTICLE BEAM SYSTEMS
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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09981663
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Filing Dt:
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10/16/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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LOW POWER SCHOTTKY EMITTER
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09982110
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Filing Dt:
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10/17/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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FOCUSED ION BEAM SYSTEM
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10024639
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Filing Dt:
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12/18/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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THIN-FILM MAGNETIC RECORDING HEAD MANUFACTURE USING SELECTIVE IMAGING
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Patent #:
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Issue Dt:
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02/17/2004
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Application #:
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10024762
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Filing Dt:
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12/20/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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PARTICLE-OPTICAL INSPECTION DEVICE ESPECIALLY FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10024777
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Filing Dt:
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12/20/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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SEM PROVIDED WITH A SECONDARY ELECTRON DETECTOR HAVING A CENTRAL ELECTRODE
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10055320
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Filing Dt:
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01/23/2002
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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FABRICATION OF HIGH RESISTIVITY STRUCTURES USING FOCUSED ION BEAMS
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10081247
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Filing Dt:
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02/22/2002
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Publication #:
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Pub Dt:
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08/29/2002
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Title:
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ELECTRON BEAM SYSTEM USING MULTIPLE ELECTRON BEAMS
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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10085490
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Filing Dt:
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02/28/2002
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Publication #:
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Pub Dt:
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10/10/2002
| | | | |
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Title:
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THIN-FILM MAGNETIC RECORDING HEAD MANUFACTURE
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10123666
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Filing Dt:
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04/16/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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METHOD OF X-RAY ANALYSIS IN A PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10135005
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Filing Dt:
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04/29/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Title:
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FOCUSED PARTICLE BEAM SYSTEMS AND METHODS USING A TILT COLUMN
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10138708
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Filing Dt:
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05/03/2002
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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HIGH ANGULAR INTENSITY SCHOTTKY ELECTRON POINT SOURCE
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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10159790
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Filing Dt:
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05/31/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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APPARATUS FOR TILTING A BEAM SYSTEM
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10186206
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Filing Dt:
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06/27/2002
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Publication #:
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Pub Dt:
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05/08/2003
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Title:
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METHOD AND APPARATUS FOR SCANNED INSTRUMENT CALIBRATION
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10206843
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Filing Dt:
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07/27/2002
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Publication #:
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Pub Dt:
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03/13/2003
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Title:
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ELECTRON BEAM PROCESSING
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