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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:021301/0023   Pages: 15
Recorded: 07/28/2008
Attorney Dkt #:211843-1/SECURITY AGREEME
Conveyance: SECURITY AGREEMENT
Total properties: 47
1
Patent #:
6452338
Issue Dt:
09/17/2002
Application #:
09736097
Filing Dt:
12/13/2000
Publication #:
US20020070672
Pub Dt:
06/13/2002
Title:
ELECTRON BEAM ION SOURCE WITH INTEGRAL LOW-TEMPERATURE VAPORIZER
2
Patent #:
7107929
Issue Dt:
09/19/2006
Application #:
10170512
Filing Dt:
06/12/2002
Publication #:
US20030230986
Pub Dt:
12/18/2003
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
3
Patent #:
6686595
Issue Dt:
02/03/2004
Application #:
10183768
Filing Dt:
06/26/2002
Publication #:
US20040000647
Pub Dt:
01/01/2004
Title:
ELECTRON IMPACT ION SOURCE
4
Patent #:
6744214
Issue Dt:
06/01/2004
Application #:
10244617
Filing Dt:
09/16/2002
Publication #:
US20030085663
Pub Dt:
05/08/2003
Title:
ELECTRON BEAM ION SOURCE WITH INTEGRAL LOW-TEMPERATURE VAPORIZER
5
Patent #:
NONE
Issue Dt:
Application #:
10251491
Filing Dt:
09/20/2002
Publication #:
US20040002202
Pub Dt:
01/01/2004
Title:
Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
6
Patent #:
7064491
Issue Dt:
06/20/2006
Application #:
10433493
Filing Dt:
01/08/2004
Publication #:
US20040104682
Pub Dt:
06/03/2004
Title:
ION IMPLANTATION SYSTEM AND CONTROL METHOD
7
Patent #:
7960709
Issue Dt:
06/14/2011
Application #:
10519699
Filing Dt:
09/14/2005
Publication #:
US20060097193
Pub Dt:
05/11/2006
Title:
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
8
Patent #:
7723233
Issue Dt:
05/25/2010
Application #:
10519700
Filing Dt:
09/14/2005
Publication #:
US20060099812
Pub Dt:
05/11/2006
Title:
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
9
Patent #:
7820981
Issue Dt:
10/26/2010
Application #:
10582392
Filing Dt:
06/28/2007
Publication #:
US20070210260
Pub Dt:
09/13/2007
Title:
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
10
Patent #:
7723700
Issue Dt:
05/25/2010
Application #:
10582524
Filing Dt:
04/05/2007
Publication #:
US20080047607
Pub Dt:
02/28/2008
Title:
CONTROLLING THE FLOW OF VAPORS SUBLIMATED FROM SOLIDS
11
Patent #:
7023138
Issue Dt:
04/04/2006
Application #:
10748078
Filing Dt:
12/30/2003
Publication #:
US20040195973
Pub Dt:
10/07/2004
Title:
ELECTRON IMPACT ION SOURCE
12
Patent #:
7022999
Issue Dt:
04/04/2006
Application #:
10825339
Filing Dt:
04/15/2004
Publication #:
US20040188631
Pub Dt:
09/30/2004
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
13
Patent #:
7112804
Issue Dt:
09/26/2006
Application #:
10887425
Filing Dt:
07/08/2004
Publication #:
US20040245476
Pub Dt:
12/09/2004
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
14
Patent #:
7185602
Issue Dt:
03/06/2007
Application #:
10887426
Filing Dt:
07/08/2004
Publication #:
US20050051096
Pub Dt:
03/10/2005
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
15
Patent #:
7955580
Issue Dt:
06/07/2011
Application #:
11041558
Filing Dt:
01/21/2005
Publication #:
US20050163693
Pub Dt:
07/28/2005
Title:
ISOTOPICALLY-ENRICHED BORANES AND METHODS OF PREPARING THEM
16
Patent #:
7641879
Issue Dt:
01/05/2010
Application #:
11047165
Filing Dt:
01/28/2005
Publication #:
US20050169827
Pub Dt:
08/04/2005
Title:
METHODS OF SYNTHESIS OF ISOTOPICALLY ENRICHED BOROHYDRIDE AND METHODS OF SYNTHESIS OF ISOTOPICALLY ENRICHED BORANES
17
Patent #:
7524477
Issue Dt:
04/28/2009
Application #:
11050159
Filing Dt:
02/02/2005
Publication #:
US20050169828
Pub Dt:
08/04/2005
Title:
METHOD OF PRODUCTION OF B10H102-AMMONIUM SALTS AND METHODS OF PRODUCTION OF B18H22
18
Patent #:
7479643
Issue Dt:
01/20/2009
Application #:
11174107
Filing Dt:
07/01/2005
Publication #:
US20050269520
Pub Dt:
12/08/2005
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
19
Patent #:
7838842
Issue Dt:
11/23/2010
Application #:
11268005
Filing Dt:
11/07/2005
Publication #:
US20060097645
Pub Dt:
05/11/2006
Title:
DUAL MODE ION SOURCE FOR ION IMPLANTATION
20
Patent #:
7609003
Issue Dt:
10/27/2009
Application #:
11365719
Filing Dt:
03/01/2006
Publication #:
US20060238133
Pub Dt:
10/26/2006
Title:
ION IMPLANTATION SYSTEM AND CONTROL METHOD
21
Patent #:
7791047
Issue Dt:
09/07/2010
Application #:
11452003
Filing Dt:
06/12/2006
Publication #:
US20060272775
Pub Dt:
12/07/2006
Title:
METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
22
Patent #:
NONE
Issue Dt:
Application #:
11502695
Filing Dt:
08/11/2006
Publication #:
US20060272776
Pub Dt:
12/07/2006
Title:
Method and apparatus for extracting ions from an ion source for use in ion implantation
23
Patent #:
7800312
Issue Dt:
09/21/2010
Application #:
11527994
Filing Dt:
09/26/2006
Publication #:
US20070108394
Pub Dt:
05/17/2007
Title:
DUAL MODE ION SOURCE FOR ION IMPLANTATION
24
Patent #:
7666771
Issue Dt:
02/23/2010
Application #:
11634565
Filing Dt:
12/06/2006
Publication #:
US20070148888
Pub Dt:
06/28/2007
Title:
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS
25
Patent #:
7629590
Issue Dt:
12/08/2009
Application #:
11647714
Filing Dt:
12/29/2006
Publication #:
US20080121811
Pub Dt:
05/29/2008
Title:
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
26
Patent #:
NONE
Issue Dt:
Application #:
11647719
Filing Dt:
12/29/2006
Publication #:
US20070108395
Pub Dt:
05/17/2007
Title:
Method and apparatus for extracting ions from an ion source for use in ion implantation
27
Patent #:
7394202
Issue Dt:
07/01/2008
Application #:
11647801
Filing Dt:
12/29/2006
Publication #:
US20070176114
Pub Dt:
08/02/2007
Title:
ION IMPLANTATION SYSTEM AND CONTROL METHOD
28
Patent #:
7491953
Issue Dt:
02/17/2009
Application #:
11647867
Filing Dt:
12/29/2006
Publication #:
US20070194252
Pub Dt:
08/23/2007
Title:
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
29
Patent #:
NONE
Issue Dt:
Application #:
11647898
Filing Dt:
12/29/2006
Publication #:
US20070241689
Pub Dt:
10/18/2007
Title:
Method and apparatus for extending equipment uptime in ion implantation
30
Patent #:
7994031
Issue Dt:
08/09/2011
Application #:
11647922
Filing Dt:
12/29/2006
Publication #:
US20070105325
Pub Dt:
05/10/2007
Title:
METHOD OF MANUFACTURING CMOS DEVICES BY THE IMPLANTATION OF N- AND P-TYPE CLUSTER IONS
31
Patent #:
7732787
Issue Dt:
06/08/2010
Application #:
11647924
Filing Dt:
12/29/2006
Publication #:
US20070262262
Pub Dt:
11/15/2007
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
32
Patent #:
NONE
Issue Dt:
Application #:
11647928
Filing Dt:
12/29/2006
Publication #:
US20080200020
Pub Dt:
08/21/2008
Title:
Semiconductor device and method of fabricating a semiconductor device
33
Patent #:
NONE
Issue Dt:
Application #:
11648091
Filing Dt:
12/29/2006
Publication #:
US20070181830
Pub Dt:
08/09/2007
Title:
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
34
Patent #:
8368309
Issue Dt:
02/05/2013
Application #:
11648269
Filing Dt:
12/29/2006
Publication #:
US20100107980
Pub Dt:
05/06/2010
Title:
METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
35
Patent #:
7528550
Issue Dt:
05/05/2009
Application #:
11648282
Filing Dt:
12/29/2006
Publication #:
US20070176115
Pub Dt:
08/02/2007
Title:
ION IMPLANTATION SYSTEM AND CONTROL METHOD
36
Patent #:
NONE
Issue Dt:
Application #:
11648365
Filing Dt:
12/29/2006
Publication #:
US20080073559
Pub Dt:
03/27/2008
Title:
Controlling the flow of vapors sublimated from solids
37
Patent #:
NONE
Issue Dt:
Application #:
11648366
Filing Dt:
12/29/2006
Publication #:
US20080042580
Pub Dt:
02/21/2008
Title:
Dual mode ion source for ion implantation
38
Patent #:
NONE
Issue Dt:
Application #:
11648378
Filing Dt:
12/29/2006
Publication #:
US20070170372
Pub Dt:
07/26/2007
Title:
Dual mode ion source for ion implantation
39
Patent #:
NONE
Issue Dt:
Application #:
11648506
Filing Dt:
12/29/2006
Publication #:
US20070107841
Pub Dt:
05/17/2007
Title:
Ion implantation ion source, system and method
40
Patent #:
NONE
Issue Dt:
Application #:
11759768
Filing Dt:
06/07/2007
Publication #:
US20080305598
Pub Dt:
12/11/2008
Title:
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES
41
Patent #:
NONE
Issue Dt:
Application #:
11778272
Filing Dt:
07/16/2007
Publication #:
US20070278417
Pub Dt:
12/06/2007
Title:
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
42
Patent #:
8586459
Issue Dt:
11/19/2013
Application #:
11934873
Filing Dt:
11/05/2007
Publication #:
US20080122005
Pub Dt:
05/29/2008
Title:
ION IMPLANTATION WITH MOLECULAR IONS CONTAINING PHOSPHORUS AND ARSENIC
43
Patent #:
7834554
Issue Dt:
11/16/2010
Application #:
11940136
Filing Dt:
11/14/2007
Publication #:
US20080087219
Pub Dt:
04/17/2008
Title:
DUAL MODE ION SOURCE FOR ION IMPLANTATION
44
Patent #:
7838850
Issue Dt:
11/23/2010
Application #:
12059608
Filing Dt:
03/31/2008
Publication #:
US20090014667
Pub Dt:
01/15/2009
Title:
EXTERNAL CATHODE ION SOURCE
45
Patent #:
7919402
Issue Dt:
04/05/2011
Application #:
12100840
Filing Dt:
04/10/2008
Publication #:
US20080299749
Pub Dt:
12/04/2008
Title:
CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING
46
Patent #:
NONE
Issue Dt:
Application #:
12105702
Filing Dt:
04/18/2008
Publication #:
US20080223409
Pub Dt:
09/18/2008
Title:
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
47
Patent #:
7928406
Issue Dt:
04/19/2011
Application #:
12125176
Filing Dt:
05/22/2008
Publication #:
US20080290266
Pub Dt:
11/27/2008
Title:
METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IONS (CLUSTER ION BEAM EXTRACTION SYSTEM)
Assignor
1
SEMEQUIP, INC.
Exec Dt:
04/11/2008
Assignee
1
TUNA INVESTMENTS, LLC, AS COLLATERAL AGENT
2304 CRANBORNE ROAD
MIDLOTHIAN, VIRGINIA 23113
Correspondence name and address
DEBORAH WING C/O KATTEN MUCHIN ROSENMAN
525 WEST MONROE STREET
CHICAGO, IL 60661

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